A new investigation of oxygen flow influence on ITO thin films by magnetron sputtering

Solar Energy Materials and Solar Cells

Volumn 120, Issue PART A, 2014, Pages 157-162

  Chen, Aqing ^a,b   Zhu, Kaigui ^a   Zhong, Huicai ^c   Shao, Qingyi ^d   Ge, Guanglu ^e  

^a BEIHANG UNIVERSITY   (China)

^b Leshan Vocational and Technical College   (China)

^c INSTITUTE OF MICROELECTRONICS   (China)

^d SOUTH CHINA NORMAL UNIVERSITY   (China)

^e NATIONAL CENTER FOR NANOSCIENCE AND TECHNOLOGY   (China)

Author keywords

Blue shifts; Density functional theory; ITO thin films; Magnetron sputtering; Oxygen vacancy

Indexed keywords

BLUE SHIFT; CALCULATION RESULTS; D.C. MAGNETRON SPUTTERING; ITO THIN FILMS; OPTICAL ABSORPTION EDGE; OXYGEN FLOW RATES; OXYGEN VACANCY CONCENTRATION; VACANCY CONCENTRATION;

BAND STRUCTURE; DENSITY FUNCTIONAL THEORY; FLOW RATE; LIGHT ABSORPTION; MAGNETRON SPUTTERING; OXYGEN; SUBSTRATES; THIN FILMS;

OXYGEN VACANCIES;

EID: 84888368665     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2013.08.036     Document Type: Article

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