Effects of oxygen flow on the properties of indium tin oxide films

Materials Chemistry and Physics

Volumn 98, Issue 1, 2006, Pages 144-147

  Li, Shitao ^a   Qiao, Xueliang ^a   Chen, Jianguo ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Indium tin oxide films; Magnetron sputtering; Oxygen flow rate; Transparent conducting film

Indexed keywords

ELECTRON ENERGY LEVELS; MAGNETRON SPUTTERING; OXIDES; REFRACTIVE INDEX; SEMICONDUCTING INDIUM COMPOUNDS; SPUTTER DEPOSITION; TIN COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

FLOW RATE; INDIUM TIN OXIDE; OXYGEN FLOW; TRANSPARENT CONDUCTING FILM;

SEMICONDUCTING FILMS;

EID: 33748695512     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2005.09.012     Document Type: Article

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