Electron microscopy observation of TiO2 nanocrystal evolution in high-temperature atomic layer deposition

Nano Letters

Volumn 13, Issue 11, 2013, Pages 5727-5734

  Shi, Jian ^a,e   Li, Zhaodong ^a   Kvit, Alexander ^a,b   Krylyuk, Sergiy ^c,d   Davydov, Albert V ^c   Wang, Xudong ^a  

^a University of Wisconsin Madison   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^d University of Maryland   (United States)

^e HARVARD UNIVERSITY   (United States)

Author keywords

atomic layer deposition; oriented attachment; Ostwald Lussac law; TiO2

Indexed keywords

AMORPHOUS AND CRYSTALLINE PHASIS; ANISOTROPIC CRYSTAL GROWTH; HIGH TEMPERATURE FORMING; ORIENTED ATTACHMENT; OSTWALD-LUSSAC LAW; SURFACE FUNCTIONALIZATION; TIO; TRANSFORMATION PROCESS;

CRYSTALLINE MATERIALS; DEPOSITION; ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; NANORODS; TITANIUM DIOXIDE; VAPORS;

ATOMIC LAYER DEPOSITION;

NANOMATERIAL; NANOPARTICLE; NANOTUBE; TITANIUM; TITANIUM DIOXIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; CRYSTALLIZATION; HEAT; SURFACE PROPERTY; ULTRASTRUCTURE;

CRYSTALLIZATION; HOT TEMPERATURE; MICROSCOPY, ATOMIC FORCE; NANOPARTICLES; NANOSTRUCTURES; NANOTUBES; SURFACE PROPERTIES; TITANIUM;

EID: 84887842418     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl403566u     Document Type: Article

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