High-accuracy method for measuring two-dimensional angles of a linear guideway

Optical Engineering

Volumn 46, Issue 5, 2007, Pages

  Kuang, Cuifang ^a   Hong, En ^b   Feng, Qibo ^a  

^a BEIJING JIAOTONG UNIVERSITY   (China)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Laser measurement; Linear guideway; Pitch; Two dimensional rotation angles; Yaw

Indexed keywords

LASER MEASUREMENT; LINEAR GUIDEWAY; TWO-DIMENSIONAL ROTATION ANGLES;

ANGLE MEASUREMENT; LASERS; LENSES;

OPTICAL COLLIMATORS;

EID: 34447560904     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2740137     Document Type: Article

References (12)

1. C.-F. Kuang and Q.-B. Feng, "Development of equipment for simultaneously measuring two-dimensional rotation angles of the linear guide track," J. Optoelectron., Laser 15(8), 965-968 (2005) (in Chinese).
2. J. S. Yeung, "Portable autocollimators using the laser diode and the position sensitive detector," Rev. Sci. Instrum. 69(2), 402-405 (1998).
3. T. R. Armstrong and M. P. Fitzgerald, "An autocollimator based on the laser head of a compact disc player," Meas. Sci. Technol. 3, 1072-1076 (1992).
4. S. Kiyono and Y. Asakawa, "A differential laser autocollimation probe for on-machine measurement," Precis. Eng. 15(2), 68-76 (1993).
5. J. Yuan and X. Long, "Temperature-autocollimator with ultrahigh angular measuring precision," Rev. Sci. Instrum. 76(12), 125106 (2005).
6. J. Yuan and X. Long, "CCD-area-based autocollimator for precision small-angle measurement," Rev. Sci. Instrum. 74(3), 1362-1365 (2005).
7. A. Just and M. Krause, "Calibration of high-resolution electronic autocollimators against an angle comparator," Metrologia 40, 288-294 (2003).
8. C. Zhang and X. Wang, "Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement," Opt. Eng. 43(12), 3008-3013 (2004).
9. D. B. Leviton, "Ultra-high resolution, absolute, Cartesian electronic autocollimator," Proc. SPIE 5190, 468-475 (2003).
10. Y.-Y. Zhang, M.-H., Zhang, and Y.-F. Qiao, "Research of CCD laser collimation system with high precision," J. Optoelectron., Laser 14(2), 168-170 (2003) (in Chinese).
11. T. Suzuki, "Two-dimensional small-rotation-angle measurement using an imaging method," Opt. Eng. 45(4), 043604 (2006).
12. P. Huang, "Laser optical measurement systems and their application to the on-line error compensation of coordinate measurement machines," PhD Dissertation, University of Michigan, Ann Arbor (1993).