Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage

Measurement Science and Technology

Volumn 22, Issue 10, 2011, Pages

  Lee, Chabum ^a   Kim, Gyu Ha ^a   Lee, Sun Kyu ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

degree of freedom; measurement; motion error; optical encoder

Indexed keywords

EDGE DETECTION; END EFFECTORS; ERRORS; INTERFEROMETRY; MEASUREMENTS; OPTICAL SENSORS;

DEGREE OF FREEDOM; DESIGN AND CONSTRUCTION; INTERFEROMETRIC TECHNIQUES; MOTION ERRORS; OPTICAL ENCODER; POSTURE MEASUREMENT; SIX DEGREE-OF-FREEDOM; TWO-DIMENSIONAL POSITION SENSITIVE DETECTORS;

DEGREES OF FREEDOM (MECHANICS);

EID: 80052736973     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/10/105901     Document Type: Article

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