Effects of sputtering power on the properties of Al-doped ZnO films deposited on amorphous silicon films substrate

Superlattices and Microstructures

Volumn 64, Issue , 2013, Pages 563-568

  Zhou, Hong Biao ^a   Zhang, Hua Yu ^a   Han, Li Wei ^a   Han, Jie Cai ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Al doped ZnO; Amorphous silicon films; Magnetron sputtering; Solar cells; Sputtering powers

Indexed keywords

AL-DOPED ZNO; AMORPHOUS SILICON FILM; ELECTRICAL AND OPTICAL PROPERTIES; FOUR-POINT PROBE MEASUREMENTS; RADIO FREQUENCY MAGNETRON SPUTTERING; SPUTTERING POWER; TRANSPARENT CONDUCTING FILMS; TRANSPARENT CONDUCTIVE ELECTRODES;

ALUMINUM; AMORPHOUS SILICON; ELECTRIC PROPERTIES; HETEROJUNCTIONS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON SOLAR CELLS; SOLAR CELLS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

CONDUCTIVE FILMS;

EID: 84887447040     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2013.10.024     Document Type: Article

References (14)

1. V. Musat, B. Teixeira, E. Fortunato, and R.C.C. Monteiro Effect of post-heat treatment on the electrical and optical properties of ZnO: Al thin films Thin Solid Films 502 2006 219 222
2. Z.Y. Zhang, C.G. Bao, W.J. Yao, S.Q. Ma, L.L. Zhang, and S.Z. Hou Influence of deposition temperature on the crystallinity of Al-doped ZnO thin films at glass substrates prepared by RF magnetron sputtering method Superlattices Microstruct. 49 2011 644 653
3. V. Assuncao, E. Fortunato, A. Marques, H. Aguas, I. Ferreira, M.E.V. Costa, and R. Martins Influence of the deposition pressure on the properties of transparent and conductive ZnO: Ga thin-film produced by RF. sputtering at room temperature Thin Solid Films 427 2003 401 405
4. S. Fujihara, C. Sasaki, and T. Kimura Crystallization behavior and origin of c-axis orientation in sol-gel-derived ZnO: Li thin films on glass substrates Appl. Surf. Sci. 180 2001 341 350
5. J.F. Chang, W.C. Lin, and M.H. Hon Effects of post-annealing on the structure and properties of Al-doped zincoxide films Appl. Surf. Sci. 183 2001 18 25
6. H.L. Hartnagel, A.L. Davar, A.K. Jain, and C. Jagadish Semiconducting Transparent Thin Films 1995 Institute of Physics Publishing London
7. J.F. Su, C.J. Tang, Q. Niu, C. Zang, Y.S. Zhang, and Z.X. Fu Al-doped ZnO films were grown on quartz substrates by MOCVD Appl. Surf. Sci. 258 2012 8595 8598
8. J. Mass, P. Bhattacharya, and R.S. Katiyar Effect of high substrate temperature on Al-doped ZnO thin films grown by pulsed laser deposition Mater. Sci. Eng. B 103 2003 9 15
9. Y.S. Kim, and W.P. Tai Electrical and optical properties of Al-doped ZnO thin films by sol-gel process Appl. Surf. Sci. 253 2007 4911 4916
10. O. Kluth, G. Schöpe, B. Rech, R. Menner, M. Oertel, K. Orgassa, and H.W. Schock Comparative material study on RF and DC magnetron sputtered ZnO: Al films Thin Solid Films 502 2005 311 316
11. H.B. Zhou, H.Y. Zhang, Z.G. Wang, and M.L. Tan Highly conductive and transparent Al-doped ZnO films on glass substrate via incorporating hydrogen at low substrate temperatures Mater. Lett. 74 2012 96 99
12. H.B. Zhou, H.Y. Zhang, M.L. Tan, and Z.G. Wang Effects of substrate temperature on the efficiency of hydrogen incorporation on the properties of Al-doped ZnO films Superlattices Microstruct. 51 2012 644 650
13. H.B. Zhou, H.Y. Zhang, W.J. Zhang, and M.L. Tan Effects of sputtering pressure on properties of Al doped ZnO thin films dynamically deposited by RF magnetron sputtering Mater. Res. Innov. 16 2012 390 394
14. A. Reynolds, D.C. Look, and B. Jogai Optically pumped ultravioletlasing from ZnO Solid State Commun. 99 1996 873 875