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Volumn 16, Issue 6, 2012, Pages 390-394

Effects of sputtering pressure on properties of Al doped ZnO thin films dynamically deposited by rf magnetron sputtering

Author keywords

AZO thin films; Dynamic deposition; Photoconductivity; Photovoltaics; Pressure; RF magnetron sputtering

Indexed keywords

AZO FILMS; AZO THIN FILMS; DEPOSITION SYSTEMS; DYNAMIC MODES; ELECTRICAL AND OPTICAL PROPERTIES; FOUR-POINT PROBE MEASUREMENTS; PHOTOVOLTAICS; PROPERTIES OF AL; RF-MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPE; SPUTTERING PRESSURES; UV-VIS SPECTROPHOTOMETERS;

EID: 84871382969     PISSN: 14328917     EISSN: 1433075X     Source Type: Journal    
DOI: 10.1179/1433075X12Y.0000000002     Document Type: Article
Times cited : (11)

References (18)
  • 2
    • 2442449271 scopus 로고    scopus 로고
    • Transparent oxide electronics
    • H. Ohta and H. Hosono: 'Transparent oxide electronics', Mater. Today, 2004, 7, 42-51.
    • (2004) Mater. Today , vol.7 , pp. 42-51
    • Ohta, H.1    Hosono, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.