Electron energy distribution function control in gas discharge plasmas

Physics of Plasmas

Volumn 20, Issue 10, 2013, Pages

  Godyak, V A ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b RF Plasma Consulting   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON KINETICS; GAS-DISCHARGE PLASMAS; LOW TEMPERATURES; NONEQUILIBRIUM CONDITIONS; NONUNIFORM ELECTRIC FIELD; RF DISCHARGE; UNIFORM ELECTRIC FIELDS;

ELECTRIC FIELDS; ELECTRON TEMPERATURE; GAS DISCHARGE TUBES;

ELECTRON ENERGY ANALYZERS;

EID: 84887243839     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4823075     Document Type: Article

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