Electron energy distribution function and plasma parameters across magnetic filters

Applied Physics Letters

Volumn 100, Issue 4, 2012, Pages

  Aanesland, A ^a   Bredin, J ^a   Chabert, P ^a   Godyak, V ^b  

^a ECOLE POLYTECHNIQUE   (France)

^b RF Plasma Consulting   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC ENERGY; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; LOCAL MINIMUMS; MONOTONOUSLY DECREASING; PLASMA DENSITY DISTRIBUTIONS; PLASMA PARAMETER;

DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; ELECTROMAGNETIC INDUCTION; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; ELECTRON TEMPERATURE; ELECTRONS; INDUCTIVELY COUPLED PLASMA; MAGNETIC FIELDS; MAGNETIC FILTERS; PLASMA DENSITY;

MAGNETOPLASMA;

EID: 84856419063     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3680088     Document Type: Article

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