Multi-dipolar microwave plasmas and their application to negative ion production

Physics of Plasmas

Volumn 20, Issue 10, 2013, Pages

  Bechu S ^a   Soum Glaude, A ^a,b   Bes A ^a   Lacoste, A ^a   Svarnas, P ^c   Aleiferis, S ^a,c   Ivanov Jr , A A ^d   Bacal, M ^d  

^a UNIVERSITÉ JOSEPH FOURIER GRENOBLE 1   (France)

^b PROMES CNRS   (France)

^c UNIVERSITY OF PATRAS   (Greece)

^d Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOUR DEPOSITION; DISSOCIATION DEGREE; DISSOCIATIVE ATTACHMENT; ELECTRON ENERGY PROBABILITY FUNCTIONS; FUNDAMENTAL MECHANISMS; HIGH-ELECTRON-DENSITY; HYDROGEN NEGATIVE IONS; MULTI-DIPOLAR PLASMAS;

CHEMICAL VAPOR DEPOSITION; DISSOCIATION; ELECTRON ENERGY LEVELS; HYDROGEN STORAGE; PLASMA SOURCES;

NEGATIVE IONS;

EID: 84887216739     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4823466     Document Type: Article

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