High density distributed microwave plasma sources in a matrix configuration: Concept, design and performance

Plasma Sources Science and Technology

Volumn 16, Issue 1, 2007, Pages 7-12

  Latrasse, L ^a   Lacoste, A ^a   Sirou, J ^a   Pelletier, J ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRON TEMPERATURE; MICROWAVES; PRESSURE EFFECTS;

LANGMUIR PROBE; MICROWAVE POWER; PLASMA SCALING; SQUARE LATTICE MATRIX CONFIGURATION;

PLASMA SOURCES;

EID: 33947646917     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/1/002     Document Type: Conference Paper

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