Novel tube-type LTCC transducers with buried heaters and inner interdigitated electrodes as a platform for gas sensing at various high temperatures

Sensors and Actuators, B: Chemical

Volumn 189, Issue , 2013, Pages 80-88

  Brandenburg, Annica ^a   Kita, Jaroslaw ^a   Groß, Andrea ^a   Moos, Ralf ^a  

^a UNIVERSITY OF BAYREUTH   (Germany)

Author keywords

Accumulating NOx sensor; Ceramic microsystems technology; Dosimeter; Low temperature co fired ceramics; Tubular LTCC gas sensor platform

Indexed keywords

CERAMIC MICROSYSTEMS TECHNOLOGY; HOMOGENOUS TEMPERATURE DISTRIBUTION; INTER-DIGITATED ELECTRODES; INTERDIGITAL ELECTRODE; LOW TEMPERATURE CO-FIRED CERAMICS; ROTATIONAL SYMMETRIES; SENSOR PLATFORM; THERMAL TIME CONSTANTS;

ALUMINA; CERAMIC MATERIALS; CHEMICAL DETECTION; CHEMICAL SENSORS; DOSIMETERS; ELECTRODES; GAS DETECTORS; GAS SENSING ELECTRODES; SENSITIVITY ANALYSIS; STRUCTURAL OPTIMIZATION; TUBES (COMPONENTS);

TRANSDUCERS;

EID: 84887096708     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.12.119     Document Type: Article

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