SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 1471-1474

  Fournier, Y ^a   Rouelle, G Boutinard ^a   Craquelin, N ^a   Maeder, T ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

flow; integrated sensor; LTCC; pressure; SMD mounting; temperature

Indexed keywords

FLOW; FLOW-SENSORS; INDEPENDENT SENSORS; INTEGRATED ELECTRONICS; INTEGRATED SENSOR; INTEGRATED SENSORS; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC; LTCC TECHNOLOGY; PHYSICAL QUANTITIES; SIGNAL CONDITIONING; STANDARD COMPONENTS; SURFACE MOUNT DEVICE;

CAISSONS; COLD STORAGE; COMPRESSED AIR; MOUNTINGS; PNEUMATICS; PRESSURE VESSELS; SURFACE MOUNT TECHNOLOGY;

SENSORS;

EID: 71549136459     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.367     Document Type: Conference Paper

References (2)

1. Fournier Y, Willigens R, Maeder T., and Ryser P. Integrated LTCC micro-fluidic modules - an SMT flow sensor. In 15th European Microelectronics and Packaging Conference (EMPC 2005) - IMAPS, pages P2.06, 577-581
2. Fournier Y, Barras A, Boutinard Rouelle G, Maeder T, and Ryser P. SMD Pressure and Flow Sensors for Industrial Compressed Air in LTCC Technology. In 17th European Microelectronics and Packaging Conference (EMPC 2009) - IMAPS, proceeding 17-S3-8