Design and characterization of a humidity sensor realized in LTCC-technology

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 979-987

  Smetana, W ^a   Unger, M ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CHARACTERIZATION; FINITE ELEMENT METHOD; METALLIC FILMS; PARAMETER ESTIMATION; THERMAL CONDUCTIVITY; WATER VAPOR;

CAPS; CRITICAL DESIGN; DRY AIR; LOW TEMPERATURE COFIRED CERAMICS TECHNOLOGY (LTCC);

HUMIDITY SENSORS;

EID: 44249098804     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0465-3     Document Type: Conference Paper

References (10)

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