Hot plate gas sensors - Are ceramics better?

International Journal of Applied Ceramic Technology

Volumn 2, Issue 5, 2005, Pages 383-389

  Kita, Jaroslaw ^a   Rettig, Frank ^a   Moos, Ralf ^a   Drüe, Karl Heinz ^b   Thust, Heiko ^b  

^a UNIVERSITY OF BAYREUTH   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CERAMIC MATERIALS; ELECTRIC PROPERTIES; SHRINKAGE; THERMODYNAMIC STABILITY;

CERAMIC HOT PLATES; HOT PLATE GAS SENSORS; LOW TEMPERATURE CO-FIRED CERAMICS;

CHEMICAL SENSORS;

EID: 27844477298     PISSN: 1546542X     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2005.02037.x     Document Type: Article

References (5)

1. G. Sberveglied, W. Hellmich, and G. Müller, "Silicon Hotplates for Metal Oxide Gas Sensors Elements," Microsystem Technol., 3 183-190 (1997).
2. I. Simon, N. Barsan, M. Bauer, and U. Weimar, "Micromachined Metal Oxide Gas Sensors: Opportunities to Improve Sensor Performance," Sensor Actuat. B: Chem., 73 1-26 (2001).
3. F. Rettig and R. Moos, "Ceramic Meso Hot-Plates for Gas Sensors," Sensors Actuat. B: Chem., 103 91-97 (2004).
4. J. Kita, F. Rettig, and R. Moos, "Laser forming Substrates for Hot-Plate Gas Sensors," J. Microelectron. Electron. Packaging, 2 [1] 14-18 (2005).
5. DIN IEC 751: Industrial Platinum Resistance Thermometer Sensors, 1983 edition (status as 1986).