A capacitive humidity sensor suitable for cmos integration

IEEE Sensors Journal

Volumn 13, Issue 11, 2013, Pages 4487-4495

  Saeidi, Nooshin ^a   Strutwolf, Jorg ^b   Marechal, Amandine ^a   Demosthenous, Andreas ^a   Donaldson, Nick ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

CMOS integration; humidity measurement; interdigitated electrodes; plasma etching; polyimide film; Thin film sensors

Indexed keywords

CMOS INTEGRATION; HUMIDITY MEASUREMENTS; INTER-DIGITATED ELECTRODES; POLYIMIDE FILM; THIN FILM SENSORS;

CMOS INTEGRATED CIRCUITS; DESIGN; HUMIDITY SENSORS; PLASMA ETCHING; POLYIMIDES; POLYMERIC FILMS; THIN FILMS;

FABRICATION;

EID: 84885603691     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2013.2270105     Document Type: Article

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