Laser straightness measurement system using optical fiber and modulation techniques

International Journal of Machine Tools and Manufacture

Volumn 40, Issue 14, 2000, Pages 2073-2081

  Fan, K C ^a   Zhao, Yang ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LASER BEAMS; OPTICAL FIBERS;

COORDINATE MEASURING MACHINES (CMM); STRAIGHTNESS MEASUREMENT;

MACHINE TOOLS;

EID: 0343442358     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(00)00040-7     Document Type: Article

References (15)

1. Greve J.W., Wilson F.W. Handbook of Industrial Metrology. 1967;Printice-Hall, Inc, New York.
2. Weck M.M. Geometric and kinematic errors. Technol. Machine Tools. 5:1980;9-12.
3. Hickman P.A. Optical tilting viewed in a new light. Laser Focus. 4(5):1968;22.
4. Herrmannsfeldt A.B.et al. Precision alignment using a system of large rectangular Fresnel lenses. Appl. Optics. 7:1968;995.
5. Chou C.et al. CCD based CMM geometrical error measurement using Fourier phase shift algorithm. Int. J. Mach. Tools Manufact. 37:1997;579-590.
6. King R.J., Raine K.W. Polarimetry applied to alignment and angle measurement. Optical Engng. 201:1981;39-43.
7. Yin C., Chen W.Z. Two-dimensional automatic straightness measurement system based on optical activity. Optical Engng. 304:1991;480-482.
8. Ni J., Huang P.S., Wu S.M. A multi-degree-of-freedom measurement system for CMM geometric errors. J. Engng Ind., Trans. ASME. 114:1992;362-369.
9. Ye S.G., Fan Y.Z. A new method to improve the alignment precision. Proc. IMEKO TC, Budapest, Hungary. 1986;14.
10. Using Material Temperature Compensation to Improve Laser Interferometer Measurement Accuracy, Application Note 325-20. 1993;Hewlett Packard Co.
11. Shimizu S., Lee H.S., Imai N. Simultaneous measuring method of the table motion errors in 6 degrees of freedom. Int. J. Japan Soc. Prec. Engng. 28:1994;273-274.
12. S.Y. Ma, J.W. Liang, Study on alignment device with light source of laser diode. Acta Metrologica Sinica 14 (1993) in Chinese.
13. Armstrong T.R., Fitzgerald M.P. An autocollimator based on the laser head of a compact disc player. Measurement Sci. 3:1992;1072-1076.
14. Madden R.M. Silicon position sensing detectors for precision measurement and control. SPIE. 153:1978;101-107.
15. Fan K.C., Chen M.J., Huang W.M. A six-degree-of-freedom measurement system for the motion accuracy of a linear stage. Int. J. Mach. Tools Manufact. 38:1998;155-164.