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Volumn 10, Issue 9, 2013, Pages 779-791

Plasma synthesis of hydrocarbon/fluorocarbon thin films with compositional gradients

(2) Tompkins, Brendan D a Fisher, Ellen R a

a Department of Environmental and Radiological Health Sciences (United States)

Author keywords

fluorocarbon plasma; gradient film; plasma polymerization; surface analysis; time resolved optical emission spectroscopy

Indexed keywords

AMORPHOUS HYDROCARBONS; COMPOSITIONAL GRADIENTS; DEPOSITION MECHANISM; FLUOROCARBON PLASMA; FLUOROCARBON PLASMA POLYMERS; GAS PHASE DIAGNOSTICS; GRADIENT FILM; TIME RESOLVED OPTICAL EMISSION SPECTROSCOPY;

DEPOSITION; EMISSION SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LUNAR SURFACE ANALYSIS; PHOTOELECTRONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA POLYMERIZATION; PLASMAS; SCANNING ELECTRON MICROSCOPY; SURFACE ANALYSIS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 84883745476 PISSN: 16128850 EISSN: 16128869 Source Type: Journal
DOI: 10.1002/ppap.201300024 Document Type: Article

Times cited : (10)

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