Study of fusion bonding of diamond to silicon for silicon-on-diamond technology

Applied Physics Letters

Volumn 81, Issue 17, 2002, Pages 3275-3277

  Yushin, G N ^a   Wolter, S D ^a   Kvit, A V ^a   Collazo, R ^a   Stoner, B R ^a   Prater, J T ^a   Sitar, Z ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS STRUCTURES; CROSS-SECTION TRANSMISSION ELECTRON MICROSCOPIES; FUSION BONDING; FUSION TEMPERATURE; INTERMEDIATE LAYERS; ROOT MEAN SQUARE ROUGHNESS; SCANNING ACOUSTIC MICROSCOPY; UNI-AXIAL MECHANICAL STRESS;

DIAMOND FILMS; DIAMONDS; STRESSES; TRANSMISSION ELECTRON MICROSCOPY;

BONDING;

EID: 79955997454     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1516636     Document Type: Article

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