Integration of diamond in fully-depleted silicon-on-insulator technology as buried insulator: A theoretical analysis

Diamond and Related Materials

Volumn 17, Issue 7-10, 2008, Pages 1248-1251

  Mazellier, Jean Paul ^a,b   Faynot, Olivier ^a   Cristoloveanu, Sorin ^b   Deleonibus, Simon ^a   Bergonzo, Philippe ^c  

^a CEA LETI   (France)

^b IMEP LAHC   (France)

^c CEA SACLAY   (France)

Author keywords

Diamond properties and applications; Electrical properties; Silicon on insulator (SOI); Thermal properties

Indexed keywords

DIAMOND FILMS; DIAMONDS; ELECTRIC NETWORK ANALYSIS; MICROSENSORS; NONMETALS; SILICA; SILICON COMPOUNDS;

DIAMOND PROPERTIES AND APPLICATIONS; ELECTRICAL PROPERTIES; ELECTRO-THERMAL SIMULATIONS; FULLY DEPLETED SILICON-ON-INSULATOR; FULLY-DEPLETED; SILICON DIOXIDES; SILICON-ON-INSULATOR (SOI); SILICON-ON-INSULATOR SUBSTRATES; TECHNOLOGICAL WORK; THEORETICAL ANALYSIS; THERMAL PROPERTIES; THIN DIAMOND FILMS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 48849105415     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.03.026     Document Type: Article

References (22)

1. International Technology Roadmap for Semiconductors (http://www.itrs.net/).
2. Cristoloveanu S., and Li S.S. Electrical Characterization of Silicon-on-Insulator Materials and Devices (1995), Kluwer Academic Publishers
3. Sze S.M. Physics of Semiconductor Devices (1981), J. Wiley & Sons
4. Shackelford J.F., and Alexander W. CRC Materials Science and Engineering Handbook (1991) 385-1496
5. Bresson N., Cristoloveanu S., Mazure C., Letertre F., and Iwai H. Solid-state Electronics 49-9 (2005) 1522
6. Oshima K., Cristoloveanu S., Guillaumot B., Iwai H., and Deleonibus S. Solid-State Electronics 48 (2004) 907
7. Su L.T., Goodson K.E., Antoniadis D.A., Flik M.I., and Chung J.E. IEDM Technical Digest, New-York (1992) 357
8. Ernst T., Tinella C., Raynaud C., and Cristoloveanu S. Solid-State Electronics 46 (2002) 373
9. Annamalai N.K., Sawyer J., Karulkar P., Maszara W., and Landstrass M. IEEE Transactions on Nuclear Science 40 (1993) 1780
10. Edholm B., Vestling L., Bergh M., Tiensuu S., and Söderbärg A. Proceedings of the IEEE International SOI Conference (1997)
11. Gu C.Z., Sun Y., Jia J.K., and Jin Z.S. Microelectronic Engineering 63 (2003) 510
12. Edholm B., Olsson J., Keskitalo N., and Vestling L. Microelectronic Engineering 36 (1997) 245
13. Aleksov A., Gobien J.M., Li X., Prater J.T., and Sitar Z. Diamond and Related Materials 15 (2006) 248
14. Silvaco ATLAS Users Manual.
15. Kim S.-H., and Fossum J.G. Solid-State Electronics 49 (2005) 595
16. Goodson K.E., Käding O.W., Rösler M., and Zachai R. Journal of Applied Physics 77 (1995) 1385
17. Jansen E., and Obermeier E. Journal of Micromechanics and Microengineering 6 (1996) 118
18. Graebner J.E., Mucha J.A., Seibles L., and Kammlott G.W. Journal of Applied Physics 71 (1992) 3143
19. Edholm B., Söderbärg A., Olsson J., and Johansson E. Japanes Journal of Applied Physics 34 (2003) 4706
20. Philip J., Hess P., Feygelson T., Butler J.E., Chattopadhyay S., Chen K.H., and Chen L.C. Journal of Applied Physics 93 (2003) 2164
21. Efimov V.B., and Mezhov-Deglin L.P. Physica B 263-264 (1999) 745
22. Lee S.-M., and Cahill D.G. Journal of Applied Physics 81 (1997) 2590