High-performance tracking of piezoelectric positioning stage using current-cycle iterative learning control with gain scheduling

IEEE Transactions on Industrial Electronics

Volumn 61, Issue 2, 2014, Pages 1085-1098

  Huang, Deqing ^a,b   Xu, Jian Xin ^c   Venkataramanan, Venkatakrishnan ^c   Huynh, Cat Tuong ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

^c DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Convergence speed; current cycle iterative learning control (ILC) (CILC); feedback control; gain scheduling; piezoelectric positioning stage; Tracking precision

Indexed keywords

FEEDBACK CONTROL; PIEZOELECTRICITY;

CONVERGENCE SPEED; GAIN SCHEDULING; ITERATIVE LEARNING CONTROL; POSITIONING STAGE; TRACKING PRECISION;

TWO TERM CONTROL SYSTEMS;

EID: 84882798699     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2013.2253071     Document Type: Article

References (30)

1. S. Devasia, E. Eleftheriou, and S. Moheimani, A survey of control issues in nanopositioning, IEEE Trans. Control Syst. Technol., vol. 15, no. 5, pp. 802-823, Sep. 2007.
2. C. Hu, B. Yao, and Q. Wang, Coordinated adaptive robust contouring control of an industrial biaxial precision gantry with cogging force compensations, IEEE Trans. Ind. Electron., vol. 57, no. 5, pp. 1746-1754, May 2010.
3. J. Gao and Y. Hu, Direct self-control for BLDC motor drives based on three-dimensional coordinate system, IEEE Trans. Ind. Electron., vol. 57, no. 8, pp. 2836-2844, Aug. 2010.
4. M.-Y. Chen, T.-B. Lin, S.-K. Hung, and L.-C. Fu, Design and experiment of a macro-micro planar maglev positioning system, IEEE Trans. Ind. Electron., vol. 59, no. 11, pp. 4128-4139, Nov. 2012.
5. Y. Zhu, C. Hu, J. Hu, and K. Yang, Accuracy and simplicity oriented selfcalibration approach for two-dimensional precision stages, IEEE Trans. Ind. Electron., vol. 60, no. 6, pp. 2264-2272, Jun. 2013.
6. S. Polit and J. Dong, Development of a high bandwidth XY nanopositioning stage for high-rate micro/nanomanufacturing, IEEE/ASME Trans. Mechatronics, vol. 16, no. 4, pp. 724-733, Aug. 2011.
7. M. Kozek, C. Benatzky, A. Schirrer, and A. Stribersky, Vibration damping of a flexible car body structure using piezo-stack actuators, Control Eng. Pract., no. 3, pp. 298-310, Mar. 2011.
8. Y. Li and Q. Xu, A novel piezoactuated XY stage with parallel, decoupled, and stacked flexure structure for micro/nanopositioning, IEEE Trans. Ind. Electron., vol. 58, no. 8, pp. 3601-3615, Aug. 2011.
9. B. Jayawardhana, H. Logemann, and P. Ryan, PID control of secondorder systems with hysteresis, Int. J. Control, no. 8, pp. 1331-1342, Aug. 2008.
10. C. Yeh, T. Ni, and S. Pan, Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry, Control Eng. Pract., vol. 13, no. 5, pp. 559-566, May 2005.
11. G. Xu, T. Ono, and M. Esashi, Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors, J. Micromech. Microeng., vol. 16, no. 12, pp. 2747-2754, Dec. 2006.
12. A. Sebastian and S.M. Salapaka, Design methodologies for robust nanopositioning, IEEE Trans. Control Syst. Technol., vol. 13, no. 6, pp. 868-876, Nov. 2005.
13. M. Van de Wal, G. Van Baars, F. Sperling, and O. Bosgra, Multivariable H-?/? feedback control design for high-precision wafer stage motion, Control Eng. Pract., vol. 10, no. 7, pp. 739-755, Jul. 2002.
14. X. Chen and T. Hisayama, Adaptive sliding-mode position control for piezo-actuated stage, IEEE Trans. Ind. Electron., vol. 55, no. 11, pp. 3927-3934, Nov. 2008.
15. S. Xiao and Y. Li, Optimal design, fabrication and control of an XY micro-positioning stage driven by electromagnetic actuators, IEEE Trans. Ind. Electron., vol. 60, no. 10, Oct. 2013.
16. C.-L. Hwang, Microprocessor-based fuzzy decentralized control of 2-D piezo-driven systems, IEEE Trans. Ind. Electron., vol. 55, no. 3, pp. 1411-1420, Mar. 2008.
17. J.-X. Xu, D. Huang, V. Venkataramanan, and C. Tuong Huynh, Precise motion tracking control of piezoelectric actuator using iterative learning controller, in Proc. IEEE Int. Conf. Ind. Electron., Melbourne, Australia, Nov. 2011, pp. 7-11.
18. A. Janaideh, S. Rakheja, and C.-Y. Su, An analytical generalized Prandtl-Ishlinskii model inversion for hysteresis compensation in micropositioning control, IEEE/ASME Trans. Mechatronics, vol. 16, no. 4, pp. 734-744, Aug. 2011.
19. Y. Xie, Y. Tan, and R. Dong, Nonlinear modeling and decoupling control of XY micropositioning stages with piezoelectric actuators, IEEE/ASME Trans. Mechatronics, vol. 18, no. 3, pp. 821-832, Jun. 2013.
20. L. Liu, K. K. Tan, S.-L. Chen, S. Huang, and T. H. Lee, SVD-based Preisach hysteresis identification and composite control of piezo actuators, ISA Trans., vol. 51, no. 3, pp. 430-438, May 2012.
21. L. Liu, K. K. Tan, A. S. Putra, and T. H. Lee, Compensation of hysteresis in piezoelectric actuator with iterative learning control, J. Control Theory and Appl., vol. 8, no. 2, pp. 176-180, 2010.
22. B. Zhang, D. Wang, Y. Ye, K. Zhou, and Y. Wang, Cyclic pseudodownsampled iterative learning control for high performance tracking, Control Eng. Pract., vol. 17, no. 8, pp. 957-965, Aug. 2009.
23. K. Abidi and J.-X. Xu, Iterative learning control for sampled-data systems: Theory to practice, IEEE Trans. Ind. Electron., vol. 58, no. 7, pp. 3002-3015, Jul. 2011.
24. H. Elci, R. W. Longman, M. Q. Phan, J.-N. N. Juang, and R. Ugoletti, Simple learning control made practical by zero-phase filtering: Applications to robotics, IEEE Trans. Circuits Syst. I, Fundam. Theory Appl., vol. 49, no. 6, pp. 753-767, Jun. 2002.
25. H. F. Dou, K. K. Tan, T. H. Lee, and Z. Zhou, Iterative learning feedback control of human limbs via functional electrical stimulation, Control Eng. Pract., vol. 7, no. 3, pp. 315-325, Mar. 1999.
26. J.-X. Xu, X. Wang, and L. T. Heng, Analysis of continuous iterative learning control systems using current cycle feedback, in Proc. Amer. Control Conf., Seattle, WA, USA, Jun. 1995, pp. 4221-4225.
27. E. Helfrich, C. Lee, D. A. Bristow, X. H. Xiao, J. Dong, A. G. Alleyne, S. M. Salapaka, and P. M. Ferreira, Combined H?-feeback control and iterative learning control design with application to nanopositioning systems, IEEE Trans. Control Syst. Technol., vol. 18, no. 2, pp. 336-351, Mar. 2010.
28. C. Bi, D. Wu, Q. Jiang, and Z. Liu, Automatic learning control for unbalance compensation in active magnetic bearings, IEEE Trans. Magn., vol. 41, no. 7, pp. 2270-2280, Jul. 2005.
29. K. K. Chew and M. Tomizuka, Digital control of repetitive errors in disk drive systems, in Proc. Amer. Control Conf., Pittsburgh, PA, USA, Jun. 21-23, 1989, pp. 540-548.
30. K. J. Astrom and T. Hagglund, PID Controllers: Theory, Design and Tuning, 2nd ed. Research Triangle Park, NC, USA: Instrum. Soc. Amer., 1995.