Review of wave propagation in baw thin film devices progress and prospects

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 120-129

  Kaitila, J ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ELASTIC WAVES; PIEZOELECTRICITY; RESONATORS; THIN FILM DEVICES; THIN FILMS; ULTRASONICS;

BAW RESONATORS; BULK ACOUSTIC WAVES; DEPOSITION TECHNIQUES; DEVICE PHYSICS; EFFECTIVE COUPLINGS; EQUIPMENT MANUFACTURERS; ESD ROBUSTNESSES; FILTERING CHARACTERISTICS; HIGH QUALITIES; LOW INSERTION LOSSES; PAPER DEVELOPMENTS; PIEZOELECTRIC PROPERTIES; POWER HANDLINGS; RAPID DEVELOPMENTS; SPURIOUS MODES; STEEP TRANSITIONS; SUPERIOR PERFORMANCES; THIN FILM PIEZOELECTRIC;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 48149113964     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.43     Document Type: Conference Paper

References (14)

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