Low-temperature synthesis of graphene on Cu using plasma-assisted thermal chemical vapor deposition

Nanoscale Research Letters

Volumn 8, Issue 1, 2013, Pages 1-5

  Chan, Shih Hao ^a   Chen, Sheng Hui ^a   Lin, Wei Ting ^a   Li, Meng Chi ^a   Lin, Yung Chang ^b   Kuo, Chien Cheng ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Chemical vapor deposition; Graphene; Low temperature; Plasma

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EMISSION SPECTROSCOPY; GRAPHENE; HYDROGEN; LOW TEMPERATURE EFFECTS; METAL CLADDING; PLASMAS; TEMPERATURE;

DEPOSITION STAGES; GASEOUS MIXTURE; GRAPHENE GROWTH; HYDROGEN CONCENTRATION; LOW TEMPERATURE SYNTHESIS; LOW TEMPERATURES; PLASMA EMISSION SPECTRUM; THERMAL CHEMICAL VAPOR DEPOSITION;

PLASMA CVD;

EID: 84881264132     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-8-285     Document Type: Article

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