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Volumn 12, Issue 3-7, 2003, Pages 917-920
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DC discharge plasma studies for nanostructured carbon CVD
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Author keywords
Nanostructures; OES; Plasma CVD
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Indexed keywords
CURRENT VOLTAGE CHARACTERISTICS;
EMISSION SPECTROSCOPY;
NANOSTRUCTURED MATERIALS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SPECTROSCOPY;
SYNTHESIS (CHEMICAL);
THIN FILMS;
NANOSTRUCTURED CARBON;
CARBON;
DIAMOND;
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EID: 0038184016
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(02)00338-2 Document Type: Article |
Times cited : (68)
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References (8)
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