Mechanism of conductivity degradation of AZO thin film in high humidity ambient

Applied Surface Science

Volumn 282, Issue , 2013, Pages 32-37

  Liu, Yen Shuo ^a   Hsieh, Chih Yi ^a   Wu, Yen Ju ^a   Wei, Yu Shan ^a   Lee, Po Ming ^a   Hsieh, Hsiu Ming ^a   Liu, Cheng Yi ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

AZO; Cr coating layer; Humidity test; Oxygen vacancy; Transparent conductive layer; XPS

Indexed keywords

ALUMINUM OXIDE; CARRIER CONCENTRATION; COATINGS; HALL MOBILITY; II-VI SEMICONDUCTORS; OPTICAL FILMS; THIN FILMS; TRANSPARENT CONDUCTING OXIDES; VACANCIES; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

ALUMINUM-DOPED ZINC OXIDE; AZO THIN FILMS; CONDUCTIVITY DEGRADATIONS; CR COATINGS; HALL MEASUREMENTS; HIGH HUMIDITY; HUMIDITY TESTS; TRANSPARENT CONDUCTIVE LAYER;

OXYGEN VACANCIES;

EID: 84880960900     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.04.167     Document Type: Article

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