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Volumn 8777, Issue , 2013, Pages

Characterizing the focus of a multilayer coated off-axis parabola for FLASH beam at λ = 4.3 nm

Author keywords

Ablative piston effect; Beam imprint; Cr Sc multilayer; Free electron laser; Laser ablation; Radiation damage. 2013 SPIE; Water window; X ray optic

Indexed keywords

ABLATED MATERIALS; BEAM IMPRINT; BEAM PROFILE MEASUREMENTS; BEAM PROFILES; NORMAL INCIDENCE; PISTON EFFECT; POST-EXPOSURE; WATER WINDOW;

EID: 84880717940     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2022403     Document Type: Conference Paper
Times cited : (5)

References (32)
  • 15
    • 84975633474 scopus 로고
    • Simple technique for measurements of pulsed Gaussian-beam spot sizes
    • Liu, J. M., "Simple technique for measurements of pulsed Gaussian-beam spot sizes," Opt. Lett. 7(5), 196-198 (1982).
    • (1982) Opt. Lett. , vol.7 , Issue.5 , pp. 196-198
    • Liu, J.M.1
  • 16
    • 33645385648 scopus 로고    scopus 로고
    • Experimental characterization of focusing by high-numerical-aperture zone plates
    • Menon, R., Gil, D. and Smith, H. I., "Experimental characterization of focusing by high-numerical-aperture zone plates," J. Opt. Soc. Am. A. 23(3), 567-571 (2006).
    • (2006) J. Opt. Soc. Am. A. , vol.23 , Issue.3 , pp. 567-571
    • Menon, R.1    Gil, D.2    Smith, H.I.3
  • 17
    • 0016572881 scopus 로고
    • Proximity effect in electron-beam lithography
    • Chang, T. H. P., "Proximity effect in electron-beam lithography," J. Vac. Sci. Technol. 12(6), 1271-1275 (1975).
    • (1975) J. Vac. Sci. Technol. , vol.12 , Issue.6 , pp. 1271-1275
    • Chang, T.H.P.1
  • 18
    • 0014982479 scopus 로고
    • New method of observing electron penetration profiles in solids
    • Hatzakis, M., "New method of observing electron penetration profiles in solids," Appl. Phys. Lett. 18(1), 7-10 (1971).
    • (1971) Appl. Phys. Lett. , vol.18 , Issue.1 , pp. 7-10
    • Hatzakis, M.1
  • 19
    • 0010201984 scopus 로고
    • X-ray optics
    • Ehrenberg, W., "X-ray optics," Nature 160, 330-331 (1947).
    • (1947) Nature , vol.160 , pp. 330-331
    • Ehrenberg, W.1
  • 20
    • 79960509791 scopus 로고    scopus 로고
    • Measurement of the point spread function of a soft Xray microscope by single pixel exposure of photoresists
    • Leontowich, A. F. G., Tyliszczak, T. and Hitchcock, A. P., "Measurement of the point spread function of a soft Xray microscope by single pixel exposure of photoresists," Proc. SPIE 8077, 80770N (2011).
    • (2011) Proc. SPIE 8077
    • Leontowich, A.F.G.1    Tyliszczak, T.2    Hitchcock, A.P.3
  • 24
    • 34249901272 scopus 로고    scopus 로고
    • Operation of a free-electron laser from the extreme ultraviolet to the water window
    • Ackermann, W. et al., "Operation of a free-electron laser from the extreme ultraviolet to the water window," Nat. Photon. 1, 336-342 (2007).
    • (2007) Nat. Photon. , vol.1 , pp. 336-342
    • Ackermann, W.1
  • 26
    • 0000882768 scopus 로고
    • High-resolution positive resists for electron-beam exposure
    • Haller, I., Hatzakis, M. and Srinivasan, R., "High-resolution positive resists for electron-beam exposure," IBM J. Res. Develop. 12(3), 251-256 (1968).
    • (1968) IBM J. Res. Develop. , vol.12 , Issue.3 , pp. 251-256
    • Haller, I.1    Hatzakis, M.2    Srinivasan, R.3
  • 27
    • 0016535487 scopus 로고
    • Developer characteristics of poly-(methyl methacrylate) electron resist
    • Greeneich, J. S., "Developer characteristics of poly-(methyl methacrylate) electron resist," J. Electrochem. Soc. 122(7), 970-976 (1975).
    • (1975) J. Electrochem. Soc. , vol.122 , Issue.7 , pp. 970-976
    • Greeneich, J.S.1
  • 30
    • 33746885926 scopus 로고    scopus 로고
    • Multiplicity and contiguity of ablation mechanisms in laser-assisted analytical microsampling
    • Bleiner, D. and Bogaerts, A., "Multiplicity and contiguity of ablation mechanisms in laser-assisted analytical microsampling," Spectrochim. Acta B 61, 421-432 (2006).
    • (2006) Spectrochim. Acta B , vol.61 , pp. 421-432
    • Bleiner, D.1    Bogaerts, A.2
  • 31
    • 0001423640 scopus 로고
    • Calorimetric and acoustic study of ultraviolet laser ablation of polymers
    • Gorodetsky, G., Kazyaka, T. G., Melcher, R. L. and Srinivasan, R., "Calorimetric and acoustic study of ultraviolet laser ablation of polymers," Appl. Phys. Lett. 46(9), 828-830 (1985).
    • (1985) Appl. Phys. Lett. , vol.46 , Issue.9 , pp. 828-830
    • Gorodetsky, G.1    Kazyaka, T.G.2    Melcher, R.L.3    Srinivasan, R.4
  • 32
    • 6144289309 scopus 로고
    • Shock waves generated by confined XeCl excimer laser ablation of polyimide
    • Zweig, A. D. and Deutsch, T. F., "Shock waves generated by confined XeCl excimer laser ablation of polyimide," Appl. Phys. B 54, 76-82 (1992).
    • (1992) Appl. Phys. B , vol.54 , pp. 76-82
    • Zweig, A.D.1    Deutsch, T.F.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.