Nanowire FET biosensors on a bulk silicon substrate

IEEE Transactions on Electron Devices

Volumn 59, Issue 8, 2012, Pages 2243-2249

  Ahn, Jae Hyuk ^a   Kim, Jee Yeon ^a   Choi, Kyungyong ^a   Moon, Dong Il ^a   Kim, Chang Hoon ^a   Seol, Myeong Lok ^a   Park, Tae Jung ^a   Lee, Sang Yup ^a   Choi, Yang Kyu ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Avian influenza (AI); Biosensor; Bosch process; Bulk substrate; Field effect transistor (FET); Nanowire

Indexed keywords

AVIAN INFLUENZA; BOSCH PROCESS; BULK SUBSTRATES; COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES; CONTROL EXPERIMENTS; NANOWIRE BIOSENSORS; PORTABLE APPLICATIONS; POSITIVELY CHARGED;

FIELD EFFECT TRANSISTORS; NANOWIRES; POLYMERS; REACTIVE ION ETCHING; SENSORS; SILICON; SILICON WAFERS;

BIOSENSORS;

EID: 84880361793     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2012.2200105     Document Type: Review

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