Experimental and theoretical studies on MEMS piezoelectric vibrational energy harvesters with mass loading

Sensors and Actuators, A: Physical

Volumn 178, Issue , 2012, Pages 76-87

  Andosca, Robert ^a,b   McDonald, T Gus ^b   Genova, Vincent ^c   Rosenberg, Steven ^b   Keating, Joseph ^d   Benedixen, Cole ^d   Wu, Junru ^a,b  

^a Dept of Physics ^*  (United States)

^b MicroGen Systems Inc   (United States)

^c Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

^d Infinite Power Solutionsm Inc   (United States)

Author keywords

Harvesters; MEMS devices; MicroElectroMechanical systems; Piezoelectric; Scavengers; Vibrational energy

Indexed keywords

MEMS DEVICES; MICRO ELECTRO MECHANICAL SYSTEM; PIEZOELECTRIC; SCAVENGERS; VIBRATIONAL ENERGIES;

ELECTRIC NETWORK SYNTHESIS; ELECTROMECHANICAL DEVICES; ENERGY HARVESTING; ENERGY MANAGEMENT; HARVESTERS; MECHATRONICS; MEMS; MICROMECHANICS; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); PARTIAL DIFFERENTIAL EQUATIONS; PIEZOELECTRICITY; SENSORS;

NANOCANTILEVERS;

EID: 84862809949     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.02.028     Document Type: Article

References (36)

1. R. Andosca, K. Lee, and J. Wu Efficient vibrational energy harvesting for WSN applications Invited presentation to the NanoPower Forum Workshop/Darnell Group San Jose, CA 2009 18 20
2. R. Andosca, K. Lee, N. Stoffel, J. Wu, P. Tspellef, and M.S. Germaine MEMS energy harvesting for WSN applications Invited Presentation to the 2009 Sensors Expo and Conference Rosemont, IL 2009
3. R.R. Vullers Micropower Energy harvesters for autonomous wireless sensor nodes: from lab to reality 2009 Sensors Expo and Conference Chicago 2009
4. S. Roundy, P.K. Wright, and J. Rabaey Energy Scavenging for Wireless Sensor Networks with Special Focus on Vibrations 2004 Kluwer Academic Publishers Boston
5. R. Quinell Energy scavenging yields endless power possibilities Electron. Des. 2009 22
6. E. Halvorsen Energy harvesters driven by broadband random vibrations J. MicroElectroMechan. Syst. 17 2008 1061 1071
7. S.N. Chen, G.J. Wang, and M.C. Chien Analytical modeling of piezoelectric vibration-induced micro power generator Mechatronics 16 2006 379 387
8. Y.B. Jeon, R. Sood, J.H. Jeong, and S. Kim MEMS Power generator with transverse mode thin film PZT Sens. Actuators A 122 2005 16 22
9. S.W. Arms, C.P. Townsend, D.L. Churchill, J.H. Galbreath, and S.W. Mundell Power Management for energy harvesting wireless sensors Proceedings of SPIE International Symposium on Smart Structures and Smart Materials San Diego, CA 2005 1 9
10. A. Kasyap, A. Phipps, M. Sheplak, K. Ngo, T. Nishida, and L. Cattafesta Lumped element modeling of piezoelectric cantilever beams for vibrational energy reclamation Proceedings of ASME International Mechanical Engineering Congress and Exposition Chicago, IL 2006 1 7
11. S.P. Beeby, M.J. Tudor, and N.M. White Energy harvesting vibration sources for microsystems applications Meas. Sci. Technol. 17 2006 R175 R195
12. R.G. Andosca, and J. Wu Energy harvesting - power everywhere MIT/Stanford Venture Lab mini-conference April 19 2011 http://www.youtube.com/watch?v=PQyP- J2s6DE
13. F. Peano, G. Coppa, C. Serazio, F. Peinetti, and A. D'angola Non-linear oscillations in a MEMs energy scavenger Math. Comput. Model. 43 2006 1412 1423
14. S.M. Gracewski, P.D. Funkenbusch, Z. Jia, D.S. Ross, and M.D. Potter Design and modeling of a micro-energy harvester using an embedded charge layer J. Micromech. Microeng. 16 2005 235 241
15. E. Reilly, E. Carleton, and P.K. Wright Thin film piezoelectric energy scavenging systems for long term medical monitoring The Third International Workshop on Body Sensor Networks. IEEE Conference at MIT Cambridge MA 2006 38 41 0-7695-2547
16. Power-Scavenging Batteries: Inexpensive chips harvest mechanical energy to charge batteries for wireless sensors, August 25, 2011 http://www. technologyreview.com/energy/38434/?p1=MstRcnt.
17. A. Hajati, and S.-G. Kim Ultra-wide bandwidth piezoelectric energy harvesting Appl. Phys. Lett. 99 2011 (083105-1-083105-3)
18. A. Erturk, and D.J. Inman A distributed parameter electromechanical model for cantilevered piezoelectric energy harvesters J. Vib. Acoustics 130 2008 (041002-1041002-15)
19. L. Meirovitch Fundamentals of Vibrations 2001 McGraw-Hill New York
20. M.S. Weinberg Working equations for piezoelectric actuators and sensors JMEMS V8 N4 1999 529 533
21. M.P. Morse Vibration and Sound 1948 McGraw-Hill New York
22. K.F. Riley, M.P. Hobson, and S.J. Bence Mathematical Methods for Physics and Engineering Third Edition 2008 Cambridge University Press
23. B.A. Auld Second ed. Acoustic Fields and Waves in Solids vol. I 1990 Krieger Publishing Co. Malabar, Florida
24. C. Liu Foundations of MEMS 2006 Pearson Prentice Hall Upper Saddle River, NY
25. RCA Clean, 2011, http://en.wikipedia.org/wiki/RCA-clean.
26. ® SR Coatings for DRIE Processes, 2011, http://www.brewerscience.com/products/protective-coatings/scratch-resistant- etch-protectivecoating.
27. ® MEC to Create Self-powered Wireless Sensor Node: MicroGen demonstrates missing-link to efficient and reliable vibrational Energy Harvesting solutions, Chicago, IL (PRWEB) June 21, 2011 http://www.prweb.com/releases/2011/6/prweb8585499.htm.
28. D.J. Caccamise, M.S. Schenewerk, Whole LottaShakin Goin On, describing some of the results from the Mackinac Bridge monitoring project April 24, 2008, www.pobonline.com.
29. D.J. Caccamise, Vibrational frequencies of Mackinac Bridge, 2009 (private conversation).
30. R. Vullers, Energy harvesting for autonomous sensor systems, Holst Centre/IMEC, The Netherlands, 2009, http://www2.fhi.nl/senseofcontact/archief/ 2009/images/holst-centre-energy-harvesting-for-autonomous-sensor-nodes-r. vullers.pdf.
31. R. Elfrink, M. Renaud, T.M. Kamel, C. de Nooijer, M. Jambunathan, M. Goedbloed, D. Hohfield, S. Matova, V. Pop, L. Caballero, and R. Schaijk Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system J. Micromech. Microeng. 20 2010 1 7 104001
32. R. Elfrink, V. Pop, D. Hohlfeld, T.M. Kamel, S. Matova, C. de Nooijer, M. Jambunathan, M. Goedbloed, L. Caballero, M. Renaud, J. Penders, and R. van Schaijk First autonomous wireless sensor node powered by a vacuum-packaged MEMS energy harvester Electron Devices Meeting (IEDM), IEEE International 7-9 Dec. 2009, Baltimore, MD 2009 1 4
33. Holst Centre/IMEC, The Netherlands: AlN-based MEMS PZEH device, 225 μW, 929 Hz, 2.5 g 2010, (private conversation).
34. R. Elfrink, S. Matova, C. de Nooijer, M. Jambunathan, M. Goedbloed, J. van de Molengraft, V. Pop, R.J.M. Vullers, M. Renaud, and R. van Schaijk Shock induced energy harvesting with a MEMS harvester for automotive applications Electron Devices Meeting (IEDM), IEEE International 5-7 Dec. 2011, Washington, D.C. 2011 29.5.1-29.5.4
35. E.E. Aktakka, R.L. Peterson, and K. Najafi Thinned PZT on SOI process and design optimization for piezoelectric inertial energy harvesting 16th International Conference on Solid-State Sensors, Actuators, and Microsystems Transducers 2011, Beijing, China, June 2011 2011 1649 1652
36. Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2002/95/EC commonly referred to as the Restriction of Hazardous Substances Directive or RoHS was adopted in February 2003 by the European Union, 2011, http://en.wikipedia.org/wiki/Restriction-of- Hazardous-Substances-Directive.