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Volumn 60, Issue , 2013, Pages 500-507

Plasma-assisted MBE growth of AlN/GaN/AlN heterostructures on Si (1 1 1) substrate

Author keywords

AlN; EDS line analysis; MBE; TEM; XRD

Indexed keywords

ALN; ENERGY DISPERSIVE X RAY SPECTROSCOPY; HIGH-RESOLUTION X-RAY DIFFRACTION; LINE ANALYSIS; MICROSTRUCTURE PROPERTIES; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY; TRANSMISSION ELECTRON MICROSCOPY (TEM); XRD;

EID: 84879299087     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2013.05.034     Document Type: Article
Times cited : (15)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.