MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer

International Journal of Hydrogen Energy

Volumn 38, Issue 19, 2013, Pages 8011-8021

  Mozalev, Alexander ^a   Calavia, Raul ^b   Vázquez, Rosa M ^b   Gràcia, Isabel ^c   Cané, Carles ^c   Correig, Xavier ^b   Vilanova, Xavier ^b   Gispert Guirado, Francesc ^b   Hubálek, Jaromír ^a,d   Llobet, Eduard ^b  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^b UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^d BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

Gas sensor; Hydrogen detection; Microhotplate; Porous anodic alumina; Tungsten trioxide

Indexed keywords

HYDROGEN DETECTION; HYDROGEN GAS DETECTION; HYDROGEN GAS SENSORS; INTEGRAL TECHNOLOGIES; MICRO HOTPLATE; OPERATING TEMPERATURE; POROUS ANODIC ALUMINA; TUNGSTEN TRIOXIDE;

ALUMINA; CHEMICAL SENSORS; GAS DETECTORS; POROUS SILICON; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

HYDROGEN;

EID: 84879083528     PISSN: 03603199     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijhydene.2013.04.063     Document Type: Article

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