Anodic formation of low-aspect-ratio porous alumina films for metal-oxide sensor application

Electrochimica Acta

Volumn 52, Issue 4, 2006, Pages 1771-1780

  Gorokh, G ^a   Mozalev, A ^a   Solovei, D ^a   Khatko, V ^b   Llobet, E ^b   Correig, X ^b  

^a BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

^b UNIVERSITAT ROVIRA I VIRGILI   (Spain)

Author keywords

Gas sensing properties; Porous anodic alumina; rf Sputtering deposition; Tungsten trioxide films

Indexed keywords

ALUMINA; ANODES; ASPECT RATIO; CARBOXYLIC ACIDS; CHEMICAL SENSORS; CONDUCTIVE FILMS; ELECTRIC RESISTANCE; ELECTROLYTES; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

GAS SENSING PROPERTIES; POROUS ANODIC ALUMINA; RF SPUTTERING-DEPOSITION; TUNGSTEN TRIOXIDE FILMS;

POROUS MATERIALS;

EID: 33751228420     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2006.01.081     Document Type: Article

References (49)

1. Chang I.F., and Howard W.E. IEEE Trans. Electron. Devices ED-22 (1975) 749
2. Arnoldussen T.C. J. Electrochem. Soc. 128 (1981) 117
3. Nishio K., Iwata K., and Masuda H. Electrochem. Solid-State Lett. 6 (2003) H21
4. Yang J.-I., Lim H., and Han S.-D. Sens. Actuators B60 (1999) 71
5. Wang X., Miura N., and Yamazoe N. Sens. Actuators B 66 (2000) 74
6. Lemire C., Lollman D.B.B., Al Mohammad A., Gillet E., and Aguir K. Sens. Actuators B 84 (2002) 43
7. Agiur K., Lemire C., and Lollman D.B.B. Sens. Actuators B 84 (2002) 1
8. Khatko V., Calderer J., Llobet E., and Correig X. Sens. Actuators B: Chem. 109 (2005) 128
9. Cantalini C., Pelino M., Sun H.T., Faccio M., Santucci S., Lozzi L., and Passacantando M. Sens. Actuators B 35/36 (1996) 112
10. Shimizu Y., and Egashira M. MRS Bull. (1999) 18
11. Qu W., and Wlodarski W. Sens. Actuators 64 (2000) 42
12. Chiorino A., Ghotti G., Prinetto F., Carotta M.C., Malagu C., and Martinelli G. Sens. Actuators B: Chem. 78 (2001) 89
13. Ivanov P., Llobet E., Vilanova X., Brezmes J., Correig X., Hubalek J., Malysz K., Gracia I., and Cane C. Book of Abstracts of the Fourth Conference on Electronic Devices. Calella de la Costa, Barcelona, February 12-14 (2003) 145
14. Lillis B., Hurley E., Galvin S., Mathewson A., and Berney H. Proceedings of the 16th European Conference on Solid State Transducers EUROSENSORS XVI. Prague (2002) 693
15. Tsuchiya H., Macak J.M., Sieber I., Taveira L., Ghicov A., Sirotna K., and Schmuki P. Electrochem. Commun. 7 (2005) 295
16. In: Bhushan (Ed). Springer Handbook of Nanotechnology (2003), Spinger-Verlag, Berlin, Heidelberg, New York 130
17. Shikanai M., Sakairi M., Takahashi H., Seo M., Takahiro K., Nagata S., and Yamaguchi S. J. Electrochem. Soc. 144 (1997) 2756
18. Mozalev A., Sakairi M., and Takahashi H. J. Electrochem. Soc. 151 (2004) F257
19. Kukhta A.V., Gorokh G.G., Kolesnik E.E., Mitkovets A.I., Taoubi M.I., Koshin Yu.A., and Mozalev A.M. Surf. Sci. 507 (2002) 593
20. Mozalev A., Mozaleva I., Sakairi M., and Takahashi H. Electrochim. Acta 50 (2005) 5065
21. Varghese O.K., Gong D., Paulose M., Ong K.G., Grimes C.A., and Dickey E.C. J. Mater. Res. 17 (2002) 1162
22. Dickey E.C., Varghese O.K., Ong K.G., Gong D., Paulose M., and Grimes C.A. Sensor 2 (2002) 91
23. Mozalev A., Sakairi M., Saeki I., and Takahashi H. Electrochim. Acta 48 (2003) 3155
24. Zhao L., Steinhart M., Yosef M., Lee S.K., and Schlecht S. Sens. Actuators B 109 (2005) 86
25. G.-Y. Zhang, B. Guo, J. Chen, Sens. Actuators B 114 (2006) 402.
26. Piao Y., Lim H., Chang J.Y., Lee W.-Y., and Kim H. Electrochim. Acta 50 (2005) 2997
27. Surganov V., and Gorokh G. Mater. Lett. 17 (1993) 121
28. Surganov V., Gorokh G., Mozalev A., and Dolgorukov B. Russ. J. Appl. Chem. 62 (1989) 1288
29. Surganov V., Morgen P., Nielsen J.C., Gorokh G., and Mozalev A. Electrochim. Acta 23 (1987) 1125
30. Masuda H., Hasegwa F., and Ono S. J. Electrochem. Soc. 144 (1997) L127
31. Surganov V. Electrochemistry 30 (1994) 374 (Transl. Elektrokhimia)
32. Sato T., and Kaminaga K. Theories of Anodized Aluminum 100Q&A (1997), Kallos Publishing Co. Ltd.
33. Masuda H., and Satoh M. Jpn. J. Appl. Phys. 35 (1996) L126
34. Solovei D., Gorokh G., and Mozalev A. Book of Abstracts of the 55th Annual Meeting of the International Society of Electrochemistry (ISE), vol. II. Electrochemistry: From Nanostructures to Power Plants. Thessaloniki, Greece, September 19-24 (2004) 1023
35. Wood G.C. In: Diggle J.W. (Ed). Oxides and Oxide Films vol. 2 (1987), Marcell Dekker, New York 41
36. Hubalek J., Malysz K., Prasek J., Vilanova X., Ivanov P., Llobet E., Brezmes J., Correig X., and Sverak Z. Sens. Actuators B 101 (2004) 277
37. Bender F., Kim C., Mlsna T., and Vetelino J.F. Sens. Actuators 77 (2001) 281
38. Kantalini C., Pelino M., Sun H.T., Faccio M., Santucci S., Lozzi L., and Passacantando M. Sens. Actuators B 35-36 (1996) 112
39. Li C., Zhang D., Liu X., Han S., Tang T., Han J., and Zhou C. Appl. Phys. Lett. 82 (2003) 1613
40. Comini E., Faglia G., Sberveglier G., Pan Z., and Wang Z.L. Appl. Phys. Lett. 81 (2002) 1869
41. Lee J., Park H., and Choi W. Environ. Sci. Technol. 36 (2002) 5462
42. Brockington J., and Stamper P.J. Inorganic Chemistry for Higher Education (1983), Longman Group Ltd., London p. 214
43. Sberveglieri G., Groppelli S., Nelli P., Tintinelli A., and Giunta G. Sens. Actuators B 24/25 (1995) 588
44. Llobet E., Molas G., Molinas P., Calderer J., Vilanova X., Brezmes J., Sueiras J.E., and Correig X. J. Electrochem. Soc. 147 (2000) 776
45. Bittencourt C., Landers R., Llobet E., Molas G., Correig X., Silva M.A.P., Sueiras J.E., and Calderer J. J. Electrochem. Soc. 149 (2002) H81
46. Khatko V., Llobet E., Vilanova X., Brezmes J., Hubalek J., Malysz K., and Correig X. Sens. Actuators B 111/112 (2005) 45
47. V. Khatko, G. Gorokh, A. Mozalev, D. Solovei, E. Llobet, X. Vilanova, X. Correig, Sens. Actuators B, in press.
48. Vrublevsky I., Parkoun V., Sokol V., and Schreckenbach J. Appl. Surf. Sci. 236 (2004) 270
49. Mozalev A., Gorokh G., Sakairi M., and Takahashi H. J. Mater. Sci. 40 (2005) 6399