Modeling the extraction of sputtered metal from high power impulse hollow cathode discharges

Plasma Sources Science and Technology

Volumn 22, Issue 3, 2013, Pages

  Hasan, M I ^a,b   Pilch, I ^b   Soderstrom D ^b   Lundin, D ^a   Helmersson, U ^b   Brenning, N ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREE OF IONIZATION; ELECTRIC PULSE; EXPANSION VOLUMES; EXTRACTION EFFICIENCIES; HOLLOW CATHODE DISCHARGE; HOLLOW CATHODES; INPUT PARAMETER; SPUTTERED SPECIES;

CATHODES; EFFICIENCY; IONIZATION OF GASES; METALS;

EXTRACTION;

EID: 84878828912     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/22/3/035006     Document Type: Article

References (23)

1. Ferreira C M and Delcroix J L 1978 J. Appl. Phys. 49 2380 (Pubitemid 8612273)
2. Kennedy R V 2001 J. Phys. D: Appl. Phys. 34 787 (Pubitemid 32259385)
3. Paduraru C, Becker K H, Belkind A, Lopez J L and Gonzalvo Y A 2007 IEEE Trans. Plasma Sci. 35 527 (Pubitemid 47018736)
4. Fearn D G and Peterson S W 2000 ESA Special Publ. 465 587
5. Kouznetsov V, Macák K, Schneider J M, Helmersson U and Petrov I 1999 Surf. Coat. Technol. 122 290
6. Gudmundsson J T, Brenning N, Lundin D and Helmersson U 2012 J. Vac. Sci. Technol. A 30 030801
7. Lidsky L M, Rothleder S D, Rose D J, Yoshikawa S, Michelson C and Mackin R J 1962 J. Appl. Phys. 33 2490
8. Chen F 1984 Introduction to Plasma Physics and Controlled Fusion 2nd edn (Berlin: Springer) p 185
9. Raizer Y P 1991 Gas Discarge Physics (Berlin: Springer) p 31
10. Pedersen H, Larsson P, Aijaz A, Jensen J and Lundin D 2012 Surf. Coat. Technol. 206 4562
11. Helmersson U, Brenning N and Söderström D 2012 Swedish Patent SE 535 381
12. Pilch I, Söderström D, Brenning N and Helmersson U 2013 Appl. Phys. Lett. 102 033108
13. Ashida S, Lee C and Lieberman M A 1995 J. Vac. Sci. Technol. A 13 2498
14. Gudmundsson J T 2008 J. Phys. Conf. Ser. 100 08201311
15. Raadu M A, Axnäs I, Gudmundsson J T, Huo C and Brenning N 2011 Plasma Sources Sci. Technol. 20 065007
16. Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharge and Materials Processing 2nd edn (New York: Wiley) p 149
17. Gudmundsson J T and Thorsteinsson E G 2007 Plasma Sources Sci. Technol. 16 399 (Pubitemid 46646763)
18. Lee M H and Chung C W 2005 Phys. Plasmas 12 073501 (Pubitemid 41259156)
19. Lu J and Kushner M J 2000 J. Appl. Phys. 87 7198
20. Lautrup B 2004 Physics of Continuous Matter: Exotic and Everyday Phenomena in the Macroscopic World (London: Taylor and Francis) ch 30
21. Stepanova M and Dew S K 2004 Nucl. Instrum. Methods Phys. Res. B 215 357-65
22. Depla D, Mahieu S and De Gryse R 2009 Thin Solid Films 517 2825-39
23. Hagelaar G and Pitchford L 2005 Plasma Sources Sci. Technol. 14 722 (Pubitemid 41609425)