Network-connected MEMS-measuring system for high-speed data transfer to CAD and simulation tools

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4827, Issue , 2002, Pages 94-102

  Rembe, Christian ^a   Kant, Rishi ^b   Young, Michael P ^b   Muller, Richard S ^b  

^a POLYTEC GMBH   (Germany)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Data handling; High speed networks; MEMS characterization; MEMS testing; Stroboscopic interferometry

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DATA HANDLING; DATA TRANSFER; INTERFEROMETRY; MICROACTUATORS; OSCILLATIONS; STROBOSCOPES;

STROBOSCOPIC INTERFEROMETRY;

MICROELECTROMECHANICAL DEVICES;

EID: 0036417459     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.468188     Document Type: Article

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