Novel characterization method for MEMS devices

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5716, Issue , 2005, Pages 198-206

  Shaporin, A V ^a   Hanf, M ^a   Doetzel, W ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

FEM simulation; Frequency response function; MEMS characterization; Parameter identification

Indexed keywords

DAMPING; DOPPLER EFFECT; EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; FREQUENCIES; FREQUENCY RESPONSE; MATHEMATICAL INSTRUMENTS; X RAY DIFFRACTION ANALYSIS;

EIGENFREQUENCIES; FREQUENCY RESPONSE FUNCTION (FRF); LASER DOPPLER INTERFEROMETER (LDI); MECHANICAL STRESS;

MICROELECTROMECHANICAL DEVICES;

EID: 21844439225     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.590305     Document Type: Conference Paper

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