Laser-scanning confocal vibrometer microscope: Theory and experiments

Review of Scientific Instruments

Volumn 77, Issue 8, 2006, Pages

  Rembe, Christian ^a   Dräbenstedt, Alexander ^a  

^a POLYTEC GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DOPPLER EFFECT; LASER APPLICATIONS; OPTICAL RESOLVING POWER; SCANNING; VIBRATION MEASUREMENT;

CONFOCAL MICROSCOPES; LASER-DOPPLER VIBROMETERS; LIGHT INTENSITY; SUBMICROMETER STRUCTURES;

OPTICAL MICROSCOPY;

EID: 33747818839     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2336103     Document Type: Article

References (28)

1. C. Rembe, G. Siegmund, H. Steger, and M. Wörtge, in Optical Inspection of Microsystems, edited by W. Osten (Taylor & Francis, Boca Raton, FL, 2006) pp. 245-292.
2. H. Z. Cummins and N. Knable, Proc. IEEE 51, 1246 (1963).
3. G. A. Massey, Proc. IEEE 56, 2157 (1968).
4. R. Whiteman, L. Laub, and W. Bates, IEEE Trans. Sonics Ultrason. 15, 186 (1968).
5. Y. Martin and H. K. Wickramasinghe, Appl. Phys. Lett. 50, 1455 (1987).
6. J. S. Burdess, B. J. Harris, D. Wood, and R. J. Pitcher, J. Microelectromech. Syst. 6, 322 (1997).
7. K. L. Turner, P. G. Hartwell, and N. C. MacDonald, Digest of Technical Papers (Tenth International Conference on Solid-State Sensors and Actuators, Transducers, '99, Sendai, Japan, 7-10 June 1999) pp. 1144-1147.
8. P. Krehl, S. Engemann, C. Rembe, and E. P. Hofer, Microsyst. Technol. 5, 113 (1999).
9. T. Ono, X. Li, and H. Miyashita, Rev. Sci. Instrum. 74, 1240 (2003).
10. A. Lewin, U.S. Patent No. 6,084,672 (4 July, 2000).
11. K. L. Ekinci and M. L. Roukes, Rev. Sci. Instrum. 76, 061101 (2005).
12. J.-F. Willhelmin, S. M. Khanna, and R. Dändliker, Acta Oto-Laryngol., Suppl. 467, 35 (1989).
13. S. M. Khanna, C. J. Koester, and S. M. van Netten, Acta Oto-Laryngol., Suppl. 467, 43 (1989).
14. T. R. Corle and G. S. Kino, Confocal Scanning Optical Microscopy and Related Imaging Systems (Academic, San Diego, 1996).
15. K. P. Ghiggino, M. R. Harris, and P. G. Spirizziri, Rev. Sci. Instrum. 63, 2999 (1992).
16. J. W. Wagner, in Physical Acoustics, edited by W. P. Mason and R. N. Thurston, (Academic, New York, 1990), Vol. 19, pp. 201-266.
17. F. R. Tolmon and J. G. Wood, J. Sci. Instrum. 33 236 (1956);
18. note from J. W. Gates, J. Sci. Instrum. ibid. 33 507 (1956).
19. S. A. Self, Appl. Opt. 22, 658 (1983).
20. E. Hecht, Optik (Addison-Wesley, Bonn, 1989), p. 473.
21. ZEMAX, Optical Design Program, User's Guide, Version 10.0, Focus Software, Inc., 2001.
22. M. Bauer, F. Ritter, and G. Siegmund, Proc. SPIE 4827, 50 (2002).
23. H.-J. von Martens, A. Link, H.-J. Schlaak, A. Täubner, and W. Wabinski, Proc. SPIE 4827 258 (2002).
24. R. Dorn, S. Quabis, and G. Leuchs, Phys. Rev. Lett. 91, 232901 (2003).
25. O. de la Rochefoucauld, S. M. Khanna, and E. S. Olson, J. Acoust. Soc. Am. 117, 1267 (2005).
26. D. M. Tanner, A. C. Owen, Jr., and F. Rodriquez, Proc. SPIE 4980 220 (2003).
27. http://www.polytec.com/ger/158_6392.asp
28. http://www.mstonline.de/foerderung/projektliste/pdf/V/3MPT048.pdf