Real-time 3D vibration measurements in microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8430, Issue , 2012, Pages

  Kowarsch, Robert ^a   Ochs, Wanja ^a   Giesen, Moritz ^a   Dräbenstedt, Alexander ^a   Winter, Marcus ^a   Rembe, Christian ^a  

^a POLYTEC GMBH   (Germany)

Author keywords

3D vibration measurement; hard disk testing and characterization; Laser Doppler vibrometry; MEMS testing and charaterization; vibration analysis

Indexed keywords

ACADEMIC RESEARCH; CARTESIAN COORDINATE SYSTEM; CURRENT TECHNOLOGY; INDUSTRIAL DEVICES; LASER DOPPLER; LASER FREQUENCY; MEMS TESTING; OPTICAL CROSS-TALK; PRACTICAL SOLUTIONS; REAL TIME MEASUREMENTS; RELIABLE MEASUREMENT; SCATTERING SURFACE; SPECIMEN SURFACES; SURFACE UNDER TESTS; THREE-DIMENSIONAL VIBRATIONS; VELOCITY VECTORS; VIBROMETERS; VIBROMETRY;

CROSSTALK; INDUSTRIAL RESEARCH; LASER BEAMS; MICROSTRUCTURE; THREE DIMENSIONAL; VIBRATION ANALYSIS; VIBRATION MEASUREMENT;

MEMS;

EID: 84862276524     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.922184     Document Type: Conference Paper

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