Resolving precursor deligation, surface species evolution, and nanoparticle nucleation during palladium atomic layer deposition

Journal of Physical Chemistry C

Volumn 117, Issue 21, 2013, Pages 11141-11148

  Lei, Yu ^a   Lu, Junling ^a   Zhao, Haiyan ^b   Liu, Bin ^a   Low, Ke Bin ^c   Wu, Tianpin ^b   Libera, Joseph A ^a   Greeley, Jeffrey P ^d   Chupas, Peter J ^b   Miller, Jeffrey T ^a   Elam, Jeffrey W ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

^d PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FUTURE DESIGNS; HETEROGENEOUS CATALYST; ORGANOMETALLIC COMPOUNDS; PAIR DISTRIBUTION FUNCTIONS; PALLADIUM NANOPARTICLES; PD NANO PARTICLE; SITU X-RAY ABSORPTION SPECTROSCOPIES; SURFACE SPECIES;

ATOMIC LAYER DEPOSITION; DEPOSITION; DESIGN; NANOPARTICLES; NUCLEATION; ORGANOMETALLICS; X RAY ABSORPTION SPECTROSCOPY;

PALLADIUM;

EID: 84878375405     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp401196f     Document Type: Article

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