New sacrificial layer based screen-printing process for free-standing thick-films applied to MEMS

International Microelectronics and Packaging Society - 3rd IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2007

Volumn , Issue , 2007, Pages 266-272

  Lucat, Claude ^a   Ginet, Patrick ^a   Ménil, Francis ^a  

^a UNIVERSITÉ BORDEAUX 1   (France)

Author keywords

Microchannel; Microresistor; Piezoelectric transformer; Sacrificial layer; Thermal microactuator; Thick film

Indexed keywords

ELECTRO-THERMAL ACTUATORS; INORGANIC MATERIALS; MICRO-RESISTOR; PIEZOELECTRIC TRANSFORMERS; SACRIFICIAL LAYER; SCREEN-PRINTING PROCESS; STRONTIUM CARBONATE; THERMAL MICROACTUATORS;

CERAMIC MATERIALS; ELECTROSTATIC ACTUATORS; FABRICATION; MICROACTUATORS; MICROCHANNELS; MICROELECTRONICS; MICROSYSTEMS; PIEZOELECTRIC DEVICES; SCREEN PRINTING; THICK FILMS;

FILMS;

EID: 84878234785     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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