Design of a piezoresistive triaxial force sensor probe using the sidewall doping method

Journal of Micromechanics and Microengineering

Volumn 23, Issue 3, 2013, Pages

  Kan, Tetsuo ^a   Takahashi, Hidetoshi ^a   Binh Khiem, Nguyen ^a   Aoyama, Yuichiro ^a   Takei, Yusuke ^a   Noda, Kentaro ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MEASUREMENT SENSOR; PIEZO-RESISTIVE; RAPID THERMAL DIFFUSION; SIDE-WALL DOPING; SPRING CONSTANTS; TRI-AXIAL FORCES; TRIAXIAL FORCE SENSORS; VECTOR QUANTITY;

NANOCANTILEVERS; PROBES;

SENSORS;

EID: 84878150891     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/3/035027     Document Type: Article

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