Dual-axis micromechanical probe for independent detection of lateral and vertical forces

Applied Physics Letters

Volumn 89, Issue 17, 2006, Pages

  Fukuzawa, Kenji ^a,b   Terada, Satoshi ^b   Shikida, Mitsuhiro ^b   Amakawa, Hiroaki ^b   Zhang, Hedong ^b   Mitsuya, Yasunaga ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FORCE CONTROL; FRICTION; MICROSCOPES; TORSIONAL STRESS;

FRICTION FORCE MICROSCOPES; MICROMECHANICAL PROBE; VERTICAL FORCES;

CANTILEVER BEAMS;

EID: 33750458971     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2369632     Document Type: Article

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