Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range

Journal of Micromechanics and Microengineering

Volumn 20, Issue 2, 2010, Pages

  Muntwyler, S ^a   Beyeler, F ^a   Nelson, B J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MEASUREMENT UNCERTAINTY; MICRO-FORCE SENSORS; MICROFABRICATION PROCESS; MULTI-AXIS SENSORS; READOUT ELECTRONICS; SENSOR DESIGNS; SILICON-ON-INSULATOR SUBSTRATES; THREE-AXIS;

OPTICAL SENSORS;

UNCERTAINTY ANALYSIS;

EID: 75649123757     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/2/025011     Document Type: Article

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