Performance of MEMS vibratory gyroscopes in harsh environments

IMAPS International Conference and Exhibition on Device Packaging, DPC 2012 - In Conjunction with the Global Business Council, GBC 2012 Spring Conference

Volumn , Issue , 2012, Pages

  Patel, Chandradip ^a   McCluskey, Patrick ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Characterization; Harsh environment; Inertial sensors; Mems gyroscope; Reliability

Indexed keywords

ELEVATED TEMPERATURE; ENVIRONMENTAL CONDITIONS; HARSH ENVIRONMENT; HIGH FREQUENCY ACOUSTICS; INERTIAL SENSOR; MEMS GYROSCOPE; MEMS VIBRATORY GYROSCOPE; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES;

ACOUSTIC NOISE; CHARACTERIZATION; ELECTROMECHANICAL DEVICES; EXHIBITIONS; MACROS; MEMS; RELIABILITY;

GYROSCOPES;

EID: 84877979118     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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