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Volumn 11, Issue , 2011, Pages 511-515

Performance degradation of the MEMS vibratory gyroscope in harsh environments

Author keywords

Angular velocity bias; Highly Accelerated Stress Test (HAST); Single axis MEMS vibratory gyroscope; Zero rate output (ZRO)

Indexed keywords

COMMERCIAL OFF-THE-SHELF; ELECTRONIC EQUIPMENT TESTING;

EID: 84869198377     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2011-65001     Document Type: Conference Paper
Times cited : (4)

References (10)
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    • Micromachined inertial sensors
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    • N. Yazdi, F. Ayazi, K. Najafi "Micromachined inertial sensors," Proceedings of the IEEE, vol.86, no.8, Pages.1640-1659, Aug-1998.
    • (1998) Proceedings of the IEEE , vol.86 , Issue.8 , pp. 1640-1659
    • Yazdi, N.1    Ayazi, F.2    Najafi, K.3
  • 3
    • 11344275297 scopus 로고    scopus 로고
    • Reliability of vacuum packaged MEMS gyroscopes
    • February
    • S. H. Choa "Reliability of vacuum packaged MEMS gyroscopes" Microelectronics and Reliability, Volume 45, Issue 2, Pages 361-369, February 2005.
    • (2005) Microelectronics and Reliability , vol.45 , Issue.2 , pp. 361-369
    • Choa, S.H.1
  • 5
    • 77955187527 scopus 로고    scopus 로고
    • Performance and reliability of MEMS gyroscopes at high temperatures
    • 2010 12th IEEE Intersociety Conference, June
    • C. Patel, F.P McCluskey, D. Lemus "Performance and reliability of MEMS gyroscopes at high temperatures," Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm), 2010 12th IEEE Intersociety Conference, vol.1, no.5, Pages2-5, June 2010.
    • (2010) Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) , vol.1 , Issue.5 , pp. 2-5
    • Patel, C.1    McCluskey, F.P.2    Lemus, D.3
  • 6
  • 7
    • 73049102709 scopus 로고    scopus 로고
    • MEMS vibratory gyroscopes - Structural approaches to improve robustness
    • Springer
    • C. Acar and A.M. Shkel "MEMS Vibratory Gyroscopes - Structural Approaches to Improve Robustness". MEMS Reference Shelf Series, Springer. 2009.
    • (2009) MEMS Reference Shelf Series
    • Acar, C.1    Shkel, A.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.