A characterization of the performance of a MEMS gyroscope in acoustically Harsh environments

IEEE Transactions on Industrial Electronics

Volumn 58, Issue 7, 2011, Pages 2591-2596

  Dean, Robert Neal ^a   Castro, Simon Thomas ^b   Flowers, George T ^a   Roth, Grant ^c   Ahmed, Anwar ^a   Hodel, Alan Scottedward ^a   Grantham, Brian Eugene ^c   Bittle, David Allen ^c   Brunsch Jr , James P ^d  

^a AUBURN UNIVERSITY   (United States)

^b AT AND T LABS RESEARCH   (United States)

^c U S ARMY   (United States)

^d Addivant USA LLC   (United States)

Author keywords

Acoustics; harsh environment; MEMS gyroscope

Indexed keywords

ACOUSTIC ENERGY; FREQUENCY COMPONENTS; HARSH ENVIRONMENT; HIGH FREQUENCY HF; HIGH-FREQUENCY VIBRATIONS; HIGH-POWER; MACRO SCALE; MECHANICAL SHOCK; MEMS GYROSCOPE; NEW APPLICATIONS; PROOF MASS; RESONATING FREQUENCY;

GYROSCOPES; MEMS; MICROELECTROMECHANICAL DEVICES; VIBRATIONS (MECHANICAL);

COMPOSITE MICROMECHANICS;

EID: 79959297351     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2010.2070772     Document Type: Article

References (23)

1. S.-H. P. Won, F. Golnaraghi, and W. W. Melek, "A fastening tool tracking system using an IMUand a position sensor with Kalman filters and a fuzzy expert system," IEEE Trans. Ind. Electron., vol. 56, no. 5, pp. 1782-1792, May 2009.
2. L. Dong and D. Avanesian, "Drive-mode control for vibrational MEMS gyroscopes," IEEE Trans. Ind. Electron., vol. 56, no. 4, pp. 956-963, Apr. 2009.
3. Y. S. Kim, B.S. Soh, and S.-G. Lee, "A new wearable input device: SCURRY," IEEE Trans. Ind. Electron., vol. 52, no. 6, pp. 1490-1499, Dec. 2005. (Pubitemid 41830019)
4. R. N. Dean and A. Luque, "Applications of microelectromechanical systems in industrial processes and services," IEEE Trans. Ind. Electron., vol. 56, no. 4, pp. 913-925, Apr. 2009.
5. M.-H. Bao, Handbook of Sensors and Actuators, Volume 8, Micro Mechanical Transducers, Pressure Sensors, Accelerometers and Gyroscopes, S. Middelhoek, Ed. New York: Elsevier, 2000, pp. 362-365.
6. R. Dean, G. Flowers, N. Sanders, R. Horvath, M. Kranz, and M. Whitley, "Micromachined vibration isolation filters to enhance packaging for mechanically harsh environments," J. Microelectron. Electron. Packag., vol. 2, no. 4, pp. 223-231, 2005. (Pubitemid 44973045)
7. T. G. Brown, "Harsh military environments and microelectromechanical (MEMS) devices," in Proc. IEEE Sensors, Oct. 22-24, 2003, pp. 753-760.
8. M. S. Weinberg and A. Kourepenis, "Error sources in in-plane silicon tuning-fork MEMS gyroscopes," J. Microelectromech. Syst., vol. 15, no. 3, pp. 479-491, Jun. 2006. (Pubitemid 43891342)
9. R. Dean, G. Flowers, A. S. Hodel, K. MacAllister, R. Horvath, A. Matras, and R. Glover, "Vibration isolation of MEMS sensors for aerospace applications," in Proc. IMAPS Int. Conf. Exhib. Adv. Packag. Syst., Mar. 10-13, 2002, pp. 166-170. (Pubitemid 35314079)
10. M. S. Weinberg and A. Kourepenis, "Error sources in in-plane silicon tuning-fork MEMS gyroscopes," J. Microelectromech. Syst., vol. 15, no. 3, pp. 479-491, Jun. 2006. (Pubitemid 43891342)
11. J. A. Geen, "Very low cost gyroscopes," in Proc. IEEE Sensors, Irvine, CA, Oct. 30-Nov. 3 2005, pp. 537-540.
12. M. S. Weinberg and A. Kourepenis, "Error sources in in-plane silicon tuning-fork MEMS gyroscopes," J. Microelectromech. Syst., vol. 15, no. 3, pp. 479-491, Jun. 2006. (Pubitemid 43891342)
13. W. Weber, M. Bellrichard, and C. Kennedy, High Angular Rate and High G Effects in the MEMS Gyro. [Online]. Available: http://www.coventor.com/pdfs/ honeywellgyro.pdf
14. W. Geiger, J. Bartholomeyczik, U. Breng, W. Gutmann, M. Hafen, E. Handrich, M. Huber, A. Jackle, U. Kempfer, H. Kopmann, J. Kunz, P. Leinfelder, R. Ohmberger, U. Probst, M. Ruf, G. Spahlinger, A. Rasch, J. Straub-Kalthoff, M. Stroda, K. Stumph, C. Weber, M. Zimmermann, and S. Zimmermann, "MEMS IMU for AHRS applications," in Proc. IEEE/ION Position, Location Navig. Symp., Monterey, CA, May 6-8, 2008, pp. 225-231.
15. W.W. Clark and B. A. Bohne, "Effects of noise on hearing," J. Amer.Med. Assoc., vol. 281, no. 17, pp. 1658-1659, May 5, 1999. (Pubitemid 29211780)
16. F. Miyara, Sound Levels. [Online]. Available: http://www.eie.fceia.unr. edu.ar/~acustica/comite/soundlev.htm
17. R. Dean, G. Flowers, A. Ahmed, A. Hodel, G. Roth, S. Castro, R. Zhou, R. Rifki, A. Moreira, B. Grantham, D. Bittle, and J. Brunsch, "On the degradation of MEMS gyroscope performance in the presence of high power acoustic noise," in Proc. IEEE Int. Symp. Ind. Electron., Vigo, Spain, Jun. 4-7, 2007, pp. 1435-1440.
18. "±300°/s," Device Data Sheet: C03227-0-3/94(B), Analog Devices, Inc., 2004.
19. "SiRRS01 MEMS Single-Axis Rate Gyro," Device Data Sheet: 08.03.DSG. 001, Inertial Products Division, BAE Syst., 2003
20. "QDARS, Device Data Sheet: 964485-1 Rev. D," Systron Donner Inertial, Concord, CA.
21. "Ceramic Gyro," NEC TOKIN Corp., Sendai, Japan.
22. M. M. Tehrani, "Ring laser gyro data analysis with cluster sampling technique," Proc. SPIE, vol. 412, pp. 207-222, 1983.
23. D. Sargent and B. O. Wyman, "Extraction of stability statistics from integrated rate data," in Proc. A1AA Guid. Control Conf., Aug. 11-13, 1980, pp. 88-94. (Pubitemid 11519801)