Performance and reliability of MEMS gyroscopes at high temperatures

2010 12th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2010

Volumn , Issue , 2010, Pages

  Patel, Chandradip ^a   McCluskey, Patrick ^a   Lemus, David ^b  

^a UNIVERSITY OF MARYLAND   (United States)

^b TRX Systems Inc   (United States)

Author keywords

MEMS gyroscope; Noise; Temperature; Thermal cycling

Indexed keywords

HIGH TEMPERATURE; MEMS GYROSCOPE; MEMS GYROSCOPE SENSORS; NOISE; NOISE TEMPERATURE; NOISE VARIATIONS; ROOM TEMPERATURE; ROTARY TABLES; SIGNAL OUTPUT; TEMPERATURE CYCLING; TEST MEASUREMENTS;

ELECTRONICS ENGINEERING; THERMAL CYCLING;

GYROSCOPES;

EID: 77955187527     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ITHERM.2010.5501319     Document Type: Conference Paper

References (8)

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