Combined temperature and humidity effects on MEMS vibratory gyroscope sensor

ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011

Volumn 1, Issue , 2011, Pages 395-399

  Patel, Chandradip ^a   McCluskey, Patrick ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Angular velocity bias; Performance drift; Single axis MEMS vibratory gyroscope; Temperature humidity bias (THB) test; Zero rate output (ZRO)

Indexed keywords

COMMERCIAL OFF THE SHELVES; DEVICE CALIBRATION; GYROSCOPE SENSORS; HARSH ENVIRONMENT; HUMIDITY EFFECTS; IN-SITU; LONG TERM STABILITY; LONG-TERM EFFECTS; MEMS GYROSCOPE; MEMS VIBRATORY GYROSCOPE; OPERATING TEMPERATURE; PERFORMANCE DRIFTS; SINGLE-AXIS; TEMPERATURE HUMIDITY; ZERO RATE OUTPUT (ZRO);

CALIBRATION; EXHIBITIONS; SENSORS; TEMPERATURE; ZIRCONIUM ALLOYS;

GYROSCOPES;

EID: 84860349390     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IPACK2011-52183     Document Type: Conference Paper

References (8)

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