Stability of a piezoresistive ceramic pressure sensor made with LTCC technology

Proceedings - IMAPS/ACerS 8th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2012

Volumn , Issue , 2012, Pages 371-376

  Zarnik, Marina Santo ^a,b,c,d   Belavic, Darko ^a,b,c,d  

^a HIPOT RR   (Slovenia)

^b IN Medica ^*  (Slovenia)

^c JO EF STEFAN INSTITUTE   (Slovenia)

^d CoE XAMASTE ^*  (Slovenia)

Author keywords

Humidity cycle; LTCC; Pressure cycles; Pressure sensor; Stability

Indexed keywords

ACCURATE MEASUREMENT; CERAMIC PRESSURE SENSORS; HUMIDITY CYCLES; INTRINSIC STABILITY; KEY CHARACTERISTICS; LONG TERM STABILITY; LTCC; PRESSURE CYCLES;

CERAMIC MATERIALS; CONVERGENCE OF NUMERICAL METHODS; EXHIBITIONS; FATIGUE TESTING; MICROSYSTEMS; PRESSURE SENSORS;

STABILITY;

EID: 84877783723     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Birol, H., Maeder, T., Nadzeyka, I., Boers, M., Ryser, P., "Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology", Sensors and Actuaors A 2007, 134, pp. 334-338.
2. U. Partsch, D. Amdt, H. Georgi, (2007). "A new concept for LTCC-based pressure sensors", Proc. Int. Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Denver, USA, 2007, THA23.
3. Y. Fournier, T. Maeder, G. Boutinard-Rouelle, A. Barras, N. Craquelin, P. Ryser, "Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics" Sensors 2010, 10(12), 11156-11173.
4. M. S. Zarnik, D. Belavic, S. Macek J. Hole, "Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure". International Journal of Applied Ceramic Technology 2009, 6(1), pp. 9-17.
5. M. S. Zarnik, D. Belavic, S. Macek, "The warm- up and offset stability of a low-pressure piezoresistive ceramic pressure sensor", Sensors and actuators A, 2010, vol. 158, no. 2, pp. 198- 206.
6. M. S. Zamik, D. Belavic, S. Macek, "Some Critical Steps in the Manufacturing of LTCC- based Pressure Sensors" Proc. International Conference MIDEM 2010, pp. 303-308.
7. M. S. Zarnik, D. Belavic, S. Macek, "An LTCC- based capacitive pressure sensor with a digital output", Informacije MIDEM 2010, 40(1), pp. 74-81.
8. M. S. Zarnik, D. Belavic, "An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor", Radioengineering, 2012, (accepted for publication).
9. M. S. Zarnik, D. Belavic, "The effect of humidity on the stability of ltcc pressure sensors", Metrology and Measurement Systems, 2012, (accepted for publication).