An experimental and numerical study of the humidity effect on the stability of a capacitive ceramic pressure sensor

Radioengineering

Volumn 21, Issue 1, 2012, Pages 201-206

  Santo Zarnik, Marina ^a,b,c   Belavic, Darko ^a,b,c  

^a HIPOT RR   (Slovenia)

^b INMedica   (Slovenia)

^c Centre of Excellence Namaste   (Slovenia)

Author keywords

Capacitive pressure sensor; Finite element analysis; Fringe electric field; LTCC; Stray capacitances

Indexed keywords

EID: 84864917226     PISSN: 12102512     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

1. st International Spring Seminar on Electronics Technology, ISSE 2008. Budapest(Hungary), 2008, p. 271-274.
2. BELAVIč, D., ZARNIK, M.S., HROVAT, M., MAČEK, S., KOSEC, M. Temperature behavior of capacitive pressure sensor fabricated with LTCC technology. Informacije MIDEM, 2009, vol.38, no. 3, p.191-196.
3. ZARNIK, M. S., BELAVIC, D., MACEK, S., Informacije MIDEM, 2010, vol. 40, no. 1, p. 74-81.
4. ZARNIK, M. S., BELAVIČ, D., MAČEK, S. Design study for a capacitive ceramic pressure sensor. Microelectronics International, 2011, vol. 28, no. 3, p. 31-35.
5. rd International Spring Seminar on Electronics Technology, ISSE 2010. Warsaw (Poland), 2010, p.350-353.
6. AVRAMOV-ZAMUROVIC, S., DUK LEE, R.A high-stability capacitance sensor system and its evaluation. IEEE Transactions on Instrumentation and Measurement, 2009, vol.58, no.4, p. 955-961.
7. IDA NATHAN Lectures and Courses. [Online] Available at: http://ee.ascs3.uakron.edu/ida/sensors.html.