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Volumn 23, Issue 3, 2013, Pages

High performance ultra-thin niobium films for superconducting hot-electron devices

Author keywords

High critical current density (JC); magnetron sputtering; niobium; superconducting ultra thin film

Indexed keywords

ALUMINUM NITRIDE (ALN); ELECTRONIC SPECTROSCOPY; HIGH CRITICAL CURRENT DENSITIES; HIGH RESISTIVITY SILICON; MGO SUBSTRATE; SAPPHIRE SUBSTRATES; SPUTTERING TARGET; STRUCTURAL CHARACTERIZATION;

EID: 84877776970     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2012.2235508     Document Type: Article
Times cited : (24)

References (32)
  • 3
    • 34547440313 scopus 로고    scopus 로고
    • Niobium hot electron bolometer development for a submillimeter heterodyne array camera
    • M. O. Reese, D. F. Santavicca, L. Frunzio, and D. E. Prober, "Niobium hot electron bolometer development for a submillimeter heterodyne array camera," IEEE Trans. Appl. Supercond., vol. 17, p. 403, 2007.
    • (2007) IEEE Trans. Appl. Supercond , vol.17 , pp. 403
    • Reese, M.O.1    Santavicca, D.F.2    Frunzio, L.3    Prober, D.E.4
  • 8
    • 77956120614 scopus 로고    scopus 로고
    • Influence of thickness, width and temperature on critical current density of Nb thin film structures
    • K. Il'in, D. Rall, M. Siegel, A. Engel, A. Schilling, A. Semenov, and H.-W. Huebers, "Influence of thickness, width and temperature on critical current density of Nb thin film structures," Phys. C, vol. 470, pp. 953-956, 2010.
    • (2010) Phys. C , vol.470 , pp. 953-956
    • Il'In, K.1    Rall, D.2    Siegel, M.3    Engel, A.4    Schilling, A.5    Semenov, A.6    Huebers, H.-W.7
  • 9
    • 33749158570 scopus 로고    scopus 로고
    • Flux flow properties of superconducting niobium thin films in clean and dirty limits
    • C. Peroz and C. Villard, "Flux flow properties of superconducting niobium thin films in clean and dirty limits," Phys. Rev. B, Condens. Matter, vol. 72, p. 014515, 2005.
    • (2005) Phys. Rev. B, Condens. Matter , vol.72 , pp. 014515
    • Peroz, C.1    Villard, C.2
  • 10
    • 0018807512 scopus 로고    scopus 로고
    • Intrinsic stress ofmagnetron-sputtered niobium films
    • C.Wu, "Intrinsic stress ofmagnetron-sputtered niobium films," Thin Solid Films, vol. 64, p. 103, 2010.
    • (2010) Thin Solid Films , vol.64 , pp. 103
    • Wu, C.1
  • 11
    • 33644540835 scopus 로고    scopus 로고
    • Dependence of magnetic penetration depth on the thickness of superconducting Nb thin films
    • A. Gubin, K. Il'in, S. Vitusevich, M. Siegel, and N. Klein, "Dependence of magnetic penetration depth on the thickness of superconducting Nb thin films," Phys. Rev. B, Condens. Matter, vol. 72, p. 064503, 2005.
    • (2005) Phys. Rev. B, Condens. Matter , vol.72 , pp. 064503
    • Gubin, A.1    Il'In, K.2    Vitusevich, S.3    Siegel, M.4    Klein, N.5
  • 12
    • 84862168587 scopus 로고    scopus 로고
    • Crossover from dirty to clean superconducting limit in dc magnetron-sputtered thin Nb films
    • O. V. Dobrovolskiy and M. Huth, "Crossover from dirty to clean superconducting limit in dc magnetron-sputtered thin Nb films," Thin Solid Films, vol. 520, pp. 5985-5990, 2012.
    • (2012) Thin Solid Films , vol.520 , pp. 5985-5990
    • Dobrovolskiy, O.V.1    Huth, M.2
  • 13
    • 68849108922 scopus 로고    scopus 로고
    • Critical properties of submicrometer-patterned Nb thin film
    • Jun
    • Y. W. Kim, Y. H. Kahng, J.-H. Choi, and S.-G. Lee, "Critical properties of submicrometer-patterned Nb thin film," IEEE Trans. Appl. Supercond., vol. 19, no. 3, pp. 2649-2652, Jun. 2009.
    • (2009) IEEE Trans. Appl. Supercond , vol.19 , Issue.3 , pp. 2649-2652
    • Kim, Y.W.1    Kahng, Y.H.2    Choi, J.-H.3    Lee, S.-G.4
  • 14
    • 27444434927 scopus 로고    scopus 로고
    • Critical current of Nb and NbN thin-film structures: The cross-section dependence
    • DOI 10.1002/pssc.200460811
    • K. Il'in, M. Siegel, A. Semenov, A. Engel, and H.-W. Hübers, "Critical current of Nb and NbN thin-film structures: The cross-section dependence," Phys. Stat. Sol. (C), vol. 2, no. 5, pp. 1680-1687, 2005. (Pubitemid 41528618)
    • (2005) Physica Status Solidi C: Conferences , vol.2 , Issue.5 , pp. 1680-1687
    • Il'in, K.1    Siegel, M.2    Semenov, A.3    Engel, A.4    Hubers, H.-W.5
  • 15
    • 70349964696 scopus 로고    scopus 로고
    • Nanostructured superconductors with asymmetric pinning potentials: Vortex ratchets
    • B. L. T. Plourde, "Nanostructured superconductors with asymmetric pinning potentials: Vortex ratchets," IEEE Trans. Appl. Supercond., vol. 19, no. 5, p. 3698, 2009.
    • (2009) IEEE Trans. Appl. Supercond , vol.19 , Issue.5 , pp. 3698
    • Plourde, B.L.T.1
  • 18
    • 79959623528 scopus 로고    scopus 로고
    • Vortex lattice matching effects in a washboard pinning potential induced by C o nanostripe arrays
    • O. V. Dobrovolskiy, E. Begun, M. Huth, V. A. Shklovskij, and M. I. Tsindlekht, "Vortex lattice matching effects in a washboard pinning potential induced by C o nanostripe arrays," Phys. C, vol. 471, pp. 449-452, 2011.
    • (2011) Phys. C , vol.471 , pp. 449-452
    • Dobrovolskiy, O.V.1    Begun, E.2    Huth, M.3    Shklovskij, V.A.4    Tsindlekht, M.I.5
  • 19
    • 58449110323 scopus 로고    scopus 로고
    • Growth and characterization of a kind of nitrogen-rich niobium nitride for bolometer applications at terahertz frequencies
    • X.-H. Lu, L. Kang, L. Zhou, J. Chen, Z.-M. Ji, C.-H. Cao, B.-B. Jin, W.-W. Xu, P.-H. Wu, and X.-S. Wang, "Growth and characterization of a kind of nitrogen-rich niobium nitride for bolometer applications at terahertz frequencies," Chin. Phys. Lett., vol. 25, no. 11, p. 4076, 2008.
    • (2008) Chin. Phys. Lett , vol.25 , Issue.11 , pp. 4076
    • Lu, X.-H.1    Kang, L.2    Zhou, L.3    Chen, J.4    Ji, Z.-M.5    Cao, C.-H.6    Jin, B.-B.7    Xu, W.-W.8    Wu, P.-H.9    Wang, X.-S.10
  • 20
    • 54949159369 scopus 로고    scopus 로고
    • Crystallographic structure and surface composition of NbNx thin films grown by RF magnetron sputtering
    • J. E. Alfonso, J. Buitrago, J. Torres, B. Santos, and J. F. Marco, "Crystallographic structure and surface composition of NbNx thin films grown by RF magnetron sputtering," Microelectron. J., vol. 39, pp. 1327-1328, 2008.
    • (2008) Microelectron. J , vol.39 , pp. 1327-1328
    • Alfonso, J.E.1    Buitrago, J.2    Torres, J.3    Santos, B.4    Marco, J.F.5
  • 21
    • 77956462436 scopus 로고    scopus 로고
    • Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering
    • J. E. Alfonso, J. Buitrago, J. Torres, J. F. Marco, and B. Santos, "Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering," J. Mater. Sci., vol. 45, pp. 5528-5533, 2011.
    • (2011) J. Mater. Sci , vol.45 , pp. 5528-5533
    • Alfonso, J.E.1    Buitrago, J.2    Torres, J.3    Marco, J.F.4    Santos, B.5
  • 22
    • 78651245291 scopus 로고    scopus 로고
    • Structural and surface property study of sputter deposited transparent conductive Nb-doped titanium oxide films
    • T. Ishida, M. Okada, T. Tsuchiya, T. Murakami, and M. Nakano, "Structural and surface property study of sputter deposited transparent conductive Nb-doped titanium oxide films," Thin Solid Films, vol. 519, pp. 1934-1942, 2011.
    • (2011) Thin Solid Films , vol.519 , pp. 1934-1942
    • Ishida, T.1    Okada, M.2    Tsuchiya, T.3    Murakami, T.4    Nakano, M.5
  • 23
    • 0021412840 scopus 로고
    • Xps comparative study on thermal oxide barrier formation on nb and nbn thin films
    • A. Ermolieff, M. Girard, C. Raoul, C. Bertrand, and T. M. Duc, "An XPS comparative study on thermal oxide barrier formation on Nb and NbN thin films," Appl. Surf. Sci., vol. 21, no. 1-4, pp. 65-79, Apr. 1985. (Pubitemid 16576782)
    • (1984) Applications of surface science , vol.21 , Issue.1-4 , pp. 65-79
    • Ermolieff, A.1    Girard, M.2    Raoul, C.3    Bertrand, C.4    Duc Tran Minh5
  • 24
    • 0023366857 scopus 로고
    • Angle-resolved xps studies of oxides at nbn, nbc, and nb surfaces
    • A. Darlinski and J. Halbritter, "Angle-resolved XPS studies of oxides at NbN, NbC, andl Nb surfaces," Surf. Interface Anal., vol. 10, pp. 223-237, 1987. (Pubitemid 17603556)
    • (1987) Surface and Interface Analysis , vol.10 , Issue.5 , pp. 223-237
    • Darlinski, A.1    Halbritter, J.2
  • 25
    • 0026186078 scopus 로고
    • + bombardment
    • DOI 10.1016/0039-6028(91)91082-9
    • P. Prieto, L. Galán, and J. M. Sanz, "An XPS study of NbNx prepared by ion implantation and the near-surface effects induced by Ar+ bombardment," Surf. Sci., vol. 251-252, pp. 701-705, Jul. 1, 1991. (Pubitemid 21696442)
    • (1991) Surface Science , vol.251-252 , pp. 701-705
    • Prieto, P.1    Galan, L.2    Sanz, J.M.3
  • 26
    • 0001146138 scopus 로고
    • Effect of oxygen segregation on the surface structure of single-crystalline niobium films on sapphire
    • C. Siirgers and H. V. Liihneysen, "Effect of oxygen segregation on the surface structure of single-crystalline niobium films on sapphire," Appl. Phys. A, vol. A54, pp. 350-354, 1992.
    • (1992) Appl. Phys. A , vol.A54 , pp. 350-354
    • Siirgers, C.1    Liihneysen, H.V.2
  • 27
    • 0037875513 scopus 로고    scopus 로고
    • Oxygen-induced surface structure of Nb(1 1 0)
    • DOI 10.1016/S0039-6028(00)00908-0
    • C. Surgers, M. Schock, and H. V. Lohneysen, "Oxygen-induced surface structure of Nb(1 1 0)," Surf. Sci., vol. 471, pp. 209-218, 2001. (Pubitemid 32092779)
    • (2001) Surface Science , vol.471 , Issue.1-3 , pp. 209-218
    • Surgers, C.1    Schock, M.2    Lohneysen, H.V.3
  • 28
    • 0037441128 scopus 로고    scopus 로고
    • Angle-resolved X-ray photoelectron spectroscopy study of the oxides on Nb surfaces for superconducting r.f. cavity applications
    • Q. Ma and R. A. Roenberg, "Angle-resolved X-ray photoelectron spectroscopy study of the oxides on Nb surfaces for superconducting r.f. cavity applications," Appl. Surf. Sci., vol. 206, pp. 209-217, 2003.
    • (2003) Appl. Surf. Sci , vol.206 , pp. 209-217
    • Ma, Q.1    Roenberg, R.A.2
  • 29
    • 84877755565 scopus 로고    scopus 로고
    • [Online]
    • . [Online]. Available: http://srdata.nist.gov/xps/Default.aspx
  • 30
    • 33748129370 scopus 로고
    • Superconductivity in the neighborhood of metallic contracts
    • L. N. Cooper, "Superconductivity in the neighborhood of metallic contracts," Phys. Rev. Lett., vol. 6, p. 12, 1961.
    • (1961) Phys. Rev. Lett , vol.6 , pp. 12
    • Cooper, L.N.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.