SCOPUS 정보 검색 플랫폼

Journal of Physics: Conference Series

Volumn 417, Issue 1, 2013, Pages

Investigation of inhomogeneity of TiO2 thin films using spectroscopic ellipsometry

(5) Horprathum, M a Kaewkhao, J b,c Eiamchai, P a Chindaudom, P a Limsuwan, P c,d

a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER (Thailand)

b NAKHON PATHOM RAJABHAT UNIVERSITY (Thailand)

c Thailand Ministry of Science and Technology (Thailand)

d KING MONGKUT'S UNIVERSITY OF TECHNOLOGY THONBURI (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

CURVE FITTING; ELECTRON EMISSION; ELECTRON MICROSCOPY; ELECTRONS; ELLIPSOMETRY; FIELD EMISSION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; OPTICAL FILMS; OPTICAL PROPERTIES; OXIDES; REGRESSION ANALYSIS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; TITANIUM; TITANIUM DIOXIDE; X RAY DIFFRACTION;

DC REACTIVE MAGNETRON SPUTTERING; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; GRAZING INCIDENCE X-RAY DIFFRACTION; LORENTZ DISPERSION MODEL; MICRO-STRUCTURAL; OPERATING PRESSURE; SPECTROSCOPIC ELLIPSOMETERS; TITANIUM DIOXIDE THIN FILM;

THIN FILMS;

EID: 84875883482 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/417/1/012007 Document Type: Conference Paper

Times cited : (6)

References (12)

1
- 0001289091
- 10.1364/AO.35.006703 0003-6935
- Kim S Y 1996 Appl. Opt. 35 6703
- (1996) Appl. Opt. , vol.35 , Issue.34 , pp. 6703
- Kim, S.Y.¹

2
- 13444249754
- 10.1016/j.tsf.2004.08.035 0040-6090
- Kim S H and Hwangbo C K 2005 Thin Solid Films 475 155
- (2005) Thin Solid Films , vol.475 , Issue.1-2 , pp. 155
- Kim, S.H.¹ Hwangbo, C.K.²

3
- 41749121002
- 10.1016/j.apsusc.2007.12.003 0169-4332
- ícha J, Musil J, Meissner M, erstvý R 2008 Appl. Surf. Sci. 254 3793
- (2008) Appl. Surf. Sci. , vol.254 , Issue.13 , pp. 3793
- Ícha, J.¹ Musil, J.² Meissner, M.³ Erstvý, R.⁴

4
- 33646698210
- 10.1116/1.2187993 0734-2101 A
- Musil J, Heman D, ícha J 2006 J. Vac. Sci. Technol. A 24 521
- (2006) J. Vac. Sci. Technol. , vol.24 , Issue.3 , pp. 521
- Musil, J.¹ Heman, D.² Ícha, J.³

5
- 77955205531
- 10.1063/1.3457839 0021-8979
- Horprathum M, Chindaudom P, Limnonthakul P, Eiamchai P, Nuntawong N, Patthanasettakul V, Pokaipisit A, Limsuwan P 2010 J. Appl, Phys. 108 013522
- (2010) J. Appl, Phys. , vol.108 , Issue.1 , pp. 013522
- Horprathum, M.¹ Chindaudom, P.² Limnonthakul, P.³ Eiamchai, P.⁴ Nuntawong, N.⁵ Patthanasettakul, V.⁶ Pokaipisit, A.⁷ Limsuwan, P.⁸

6
- 84875887742
- 10.1016/0040-6090(93)90200-9 0040-6090
- Li-Joan M, Santos M P 1993 Thin Solid films 226 22
- (1993) Thin Solid Films , vol.226 , Issue.1 , pp. 22
- Li-Joan, M.¹ Santos, M.P.²

7
- 33847707761
- 10.1016/j.jcrysgro.2007.01.008 0022-0248
- Zhang Y, Ma X, Chen P, Yang D 2007 J. Crys. Grow. 300 551
- (2007) J. Crys. Grow. , vol.300 , Issue.2 , pp. 551
- Zhang, Y.¹ Ma, X.² Chen, P.³ Yang, D.⁴

8
- 24644486011
- 10.1016/j.surfcoat.2005.01.018 0257-8972
- Glöß D, Franch P, Zywitzki O, Modes T, Klinkenberg S, Gottfried C 2005 Surf. Coat. Technol. 200 967
- (2005) Surf. Coat. Technol. , vol.200 , Issue.1-4 , pp. 967
- Glöß, D.¹ Franch, P.² Zywitzki, O.³ Modes, T.⁴ Klinkenberg, S.⁵ Gottfried, C.⁶

9
- 0141748179
- 10.1016/S0040-6090(03)00987-8 0040-6090
- Yamagishi M, Kuriki S, Song PK, shigesato Y 2003 Thin Solid Films 442 227
- (2003) Thin Solid Films , vol.442 , Issue.1-2 , pp. 227
- Yamagishi, M.¹ Kuriki, S.² Song, P.K.³ Shigesato, Y.⁴

10
- 58149466597
- 10.1016/j.cap.2008.06.011 1567-1739
- Eiamchai P, Chindaudom P, Pokaipisit A and Limsuwan P 2008 Cur. Appl. Phys. 9 707
- (2008) Cur. Appl. Phys. , vol.9 , Issue.3 , pp. 707
- Eiamchai, P.¹ Chindaudom, P.² Pokaipisit, A.³ Limsuwan, P.⁴

11
- 34249981273
- 0256-307X 021
- Horprathum M, Chindaudom P and Limsuwan P 2007 Chin. Phys. Lett. 24 1505
- (2007) Chin. Phys. Lett. , vol.24 , Issue.6 , pp. 1505
- Horprathum, M.¹ Chindaudom, P.² Limsuwan, P.³

12
- 0017945583
- 10.1116/1.569448 0022-5355
- Thonton J A 1978 J. Vac. Sci. Technol. 15 171
- (1978) J. Vac. Sci. Technol. , vol.15 , Issue.2 , pp. 171
- Thonton, J.A.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.